JPS5091276A - - Google Patents
Info
- Publication number
- JPS5091276A JPS5091276A JP13779073A JP13779073A JPS5091276A JP S5091276 A JPS5091276 A JP S5091276A JP 13779073 A JP13779073 A JP 13779073A JP 13779073 A JP13779073 A JP 13779073A JP S5091276 A JPS5091276 A JP S5091276A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13779073A JPS5091276A (ko) | 1973-12-12 | 1973-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13779073A JPS5091276A (ko) | 1973-12-12 | 1973-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5091276A true JPS5091276A (ko) | 1975-07-21 |
Family
ID=15206896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13779073A Pending JPS5091276A (ko) | 1973-12-12 | 1973-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5091276A (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6016428A (ja) * | 1983-07-08 | 1985-01-28 | Matsushita Electric Ind Co Ltd | 化合物半導体のエツチング方法 |
-
1973
- 1973-12-12 JP JP13779073A patent/JPS5091276A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6016428A (ja) * | 1983-07-08 | 1985-01-28 | Matsushita Electric Ind Co Ltd | 化合物半導体のエツチング方法 |
| JPH0213926B2 (ko) * | 1983-07-08 | 1990-04-05 | Matsushita Electric Ind Co Ltd |