JPS508782A - - Google Patents

Info

Publication number
JPS508782A
JPS508782A JP5998773A JP5998773A JPS508782A JP S508782 A JPS508782 A JP S508782A JP 5998773 A JP5998773 A JP 5998773A JP 5998773 A JP5998773 A JP 5998773A JP S508782 A JPS508782 A JP S508782A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5998773A
Other languages
Japanese (ja)
Other versions
JPS535869B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5998773A priority Critical patent/JPS535869B2/ja
Publication of JPS508782A publication Critical patent/JPS508782A/ja
Publication of JPS535869B2 publication Critical patent/JPS535869B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP5998773A 1973-05-28 1973-05-28 Expired JPS535869B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5998773A JPS535869B2 (enrdf_load_stackoverflow) 1973-05-28 1973-05-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5998773A JPS535869B2 (enrdf_load_stackoverflow) 1973-05-28 1973-05-28

Publications (2)

Publication Number Publication Date
JPS508782A true JPS508782A (enrdf_load_stackoverflow) 1975-01-29
JPS535869B2 JPS535869B2 (enrdf_load_stackoverflow) 1978-03-02

Family

ID=13129015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5998773A Expired JPS535869B2 (enrdf_load_stackoverflow) 1973-05-28 1973-05-28

Country Status (1)

Country Link
JP (1) JPS535869B2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51140888A (en) * 1975-05-30 1976-12-04 Hitachi Ltd A vapor phase growth apparatus
JPS61121734U (enrdf_load_stackoverflow) * 1985-01-18 1986-07-31
JPS63232422A (ja) * 1987-03-20 1988-09-28 Hitachi Ltd 半導体ウエハの熱処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51140888A (en) * 1975-05-30 1976-12-04 Hitachi Ltd A vapor phase growth apparatus
JPS61121734U (enrdf_load_stackoverflow) * 1985-01-18 1986-07-31
JPS63232422A (ja) * 1987-03-20 1988-09-28 Hitachi Ltd 半導体ウエハの熱処理装置

Also Published As

Publication number Publication date
JPS535869B2 (enrdf_load_stackoverflow) 1978-03-02

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