JPS5087781A - - Google Patents

Info

Publication number
JPS5087781A
JPS5087781A JP13613273A JP13613273A JPS5087781A JP S5087781 A JPS5087781 A JP S5087781A JP 13613273 A JP13613273 A JP 13613273A JP 13613273 A JP13613273 A JP 13613273A JP S5087781 A JPS5087781 A JP S5087781A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13613273A
Other languages
Japanese (ja)
Other versions
JPS5338158B2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13613273A priority Critical patent/JPS5338158B2/ja
Publication of JPS5087781A publication Critical patent/JPS5087781A/ja
Publication of JPS5338158B2 publication Critical patent/JPS5338158B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP13613273A 1973-12-07 1973-12-07 Expired JPS5338158B2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13613273A JPS5338158B2 (https=) 1973-12-07 1973-12-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13613273A JPS5338158B2 (https=) 1973-12-07 1973-12-07

Publications (2)

Publication Number Publication Date
JPS5087781A true JPS5087781A (https=) 1975-07-15
JPS5338158B2 JPS5338158B2 (https=) 1978-10-13

Family

ID=15168043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13613273A Expired JPS5338158B2 (https=) 1973-12-07 1973-12-07

Country Status (1)

Country Link
JP (1) JPS5338158B2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5333582A (en) * 1976-09-10 1978-03-29 Hitachi Ltd Production of semiconductor device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6210870U (https=) * 1985-07-03 1987-01-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5333582A (en) * 1976-09-10 1978-03-29 Hitachi Ltd Production of semiconductor device

Also Published As

Publication number Publication date
JPS5338158B2 (https=) 1978-10-13

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