JPS5087577A - - Google Patents
Info
- Publication number
- JPS5087577A JPS5087577A JP13603173A JP13603173A JPS5087577A JP S5087577 A JPS5087577 A JP S5087577A JP 13603173 A JP13603173 A JP 13603173A JP 13603173 A JP13603173 A JP 13603173A JP S5087577 A JPS5087577 A JP S5087577A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Weting (AREA)
- Led Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13603173A JPS5524258B2 (ja) | 1973-12-07 | 1973-12-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13603173A JPS5524258B2 (ja) | 1973-12-07 | 1973-12-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5087577A true JPS5087577A (ja) | 1975-07-14 |
| JPS5524258B2 JPS5524258B2 (ja) | 1980-06-27 |
Family
ID=15165552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13603173A Expired JPS5524258B2 (ja) | 1973-12-07 | 1973-12-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5524258B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017041526A (ja) * | 2015-08-19 | 2017-02-23 | 濱田重工株式会社 | 単結晶ＳｉＣウェハのウェットエッチング方法並びにウェットエッチング液及びウェットエッチング装置 |
-
1973
- 1973-12-07 JP JP13603173A patent/JPS5524258B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017041526A (ja) * | 2015-08-19 | 2017-02-23 | 濱田重工株式会社 | 単結晶ＳｉＣウェハのウェットエッチング方法並びにウェットエッチング液及びウェットエッチング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5524258B2 (ja) | 1980-06-27 |