JPS5085651U - - Google Patents
Info
- Publication number
- JPS5085651U JPS5085651U JP14189873U JP14189873U JPS5085651U JP S5085651 U JPS5085651 U JP S5085651U JP 14189873 U JP14189873 U JP 14189873U JP 14189873 U JP14189873 U JP 14189873U JP S5085651 U JPS5085651 U JP S5085651U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14189873U JPS5085651U (ja) | 1973-12-14 | 1973-12-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14189873U JPS5085651U (ja) | 1973-12-14 | 1973-12-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5085651U true JPS5085651U (ja) | 1975-07-22 |
Family
ID=28422168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14189873U Pending JPS5085651U (ja) | 1973-12-14 | 1973-12-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5085651U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63192864A (ja) * | 1987-02-06 | 1988-08-10 | Canon Inc | 気体軸受装置 |
| JPH09129712A (ja) * | 1996-07-29 | 1997-05-16 | Canon Inc | 半導体製造装置 |
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1973
- 1973-12-14 JP JP14189873U patent/JPS5085651U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63192864A (ja) * | 1987-02-06 | 1988-08-10 | Canon Inc | 気体軸受装置 |
| JPH09129712A (ja) * | 1996-07-29 | 1997-05-16 | Canon Inc | 半導体製造装置 |