JPS5084474A - - Google Patents

Info

Publication number
JPS5084474A
JPS5084474A JP13516473A JP13516473A JPS5084474A JP S5084474 A JPS5084474 A JP S5084474A JP 13516473 A JP13516473 A JP 13516473A JP 13516473 A JP13516473 A JP 13516473A JP S5084474 A JPS5084474 A JP S5084474A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13516473A
Other languages
Japanese (ja)
Other versions
JPS5222832B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13516473A priority Critical patent/JPS5222832B2/ja
Priority to US05/447,260 priority patent/US3962988A/en
Publication of JPS5084474A publication Critical patent/JPS5084474A/ja
Publication of JPS5222832B2 publication Critical patent/JPS5222832B2/ja
Expired legal-status Critical Current

Links

JP13516473A 1973-03-05 1973-11-30 Expired JPS5222832B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP13516473A JPS5222832B2 (en) 1973-11-30 1973-11-30
US05/447,260 US3962988A (en) 1973-03-05 1974-03-01 Ion-plating apparatus having an h.f. electrode for providing an h.f. glow discharge region

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13516473A JPS5222832B2 (en) 1973-11-30 1973-11-30

Publications (2)

Publication Number Publication Date
JPS5084474A true JPS5084474A (en) 1975-07-08
JPS5222832B2 JPS5222832B2 (en) 1977-06-20

Family

ID=15145308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13516473A Expired JPS5222832B2 (en) 1973-03-05 1973-11-30

Country Status (1)

Country Link
JP (1) JPS5222832B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5175679A (en) * 1974-12-26 1976-06-30 Matsushita Electric Ind Co Ltd IONKOGAKUTEKIHAKUMAKUSEISEISOCHI
JPS5384885A (en) * 1976-12-31 1978-07-26 Youichi Murayama Surface treating apparatus
US4974544A (en) * 1986-10-07 1990-12-04 Ricoh Company, Co. Vapor deposition apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5175679A (en) * 1974-12-26 1976-06-30 Matsushita Electric Ind Co Ltd IONKOGAKUTEKIHAKUMAKUSEISEISOCHI
JPS5384885A (en) * 1976-12-31 1978-07-26 Youichi Murayama Surface treating apparatus
US4974544A (en) * 1986-10-07 1990-12-04 Ricoh Company, Co. Vapor deposition apparatus

Also Published As

Publication number Publication date
JPS5222832B2 (en) 1977-06-20

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