JPS5084474A - - Google Patents
Info
- Publication number
- JPS5084474A JPS5084474A JP13516473A JP13516473A JPS5084474A JP S5084474 A JPS5084474 A JP S5084474A JP 13516473 A JP13516473 A JP 13516473A JP 13516473 A JP13516473 A JP 13516473A JP S5084474 A JPS5084474 A JP S5084474A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13516473A JPS5222832B2 (en) | 1973-11-30 | 1973-11-30 | |
US05/447,260 US3962988A (en) | 1973-03-05 | 1974-03-01 | Ion-plating apparatus having an h.f. electrode for providing an h.f. glow discharge region |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13516473A JPS5222832B2 (en) | 1973-11-30 | 1973-11-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5084474A true JPS5084474A (en) | 1975-07-08 |
JPS5222832B2 JPS5222832B2 (en) | 1977-06-20 |
Family
ID=15145308
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13516473A Expired JPS5222832B2 (en) | 1973-03-05 | 1973-11-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5222832B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5175679A (en) * | 1974-12-26 | 1976-06-30 | Matsushita Electric Ind Co Ltd | IONKOGAKUTEKIHAKUMAKUSEISEISOCHI |
JPS5384885A (en) * | 1976-12-31 | 1978-07-26 | Youichi Murayama | Surface treating apparatus |
US4974544A (en) * | 1986-10-07 | 1990-12-04 | Ricoh Company, Co. | Vapor deposition apparatus |
-
1973
- 1973-11-30 JP JP13516473A patent/JPS5222832B2/ja not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5175679A (en) * | 1974-12-26 | 1976-06-30 | Matsushita Electric Ind Co Ltd | IONKOGAKUTEKIHAKUMAKUSEISEISOCHI |
JPS5384885A (en) * | 1976-12-31 | 1978-07-26 | Youichi Murayama | Surface treating apparatus |
US4974544A (en) * | 1986-10-07 | 1990-12-04 | Ricoh Company, Co. | Vapor deposition apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS5222832B2 (en) | 1977-06-20 |