JPS508131A - - Google Patents

Info

Publication number
JPS508131A
JPS508131A JP48058676A JP5867673A JPS508131A JP S508131 A JPS508131 A JP S508131A JP 48058676 A JP48058676 A JP 48058676A JP 5867673 A JP5867673 A JP 5867673A JP S508131 A JPS508131 A JP S508131A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48058676A
Other languages
Japanese (ja)
Other versions
JPS5323543B2 (US20020095090A1-20020718-M00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5867673A priority Critical patent/JPS5323543B2/ja
Publication of JPS508131A publication Critical patent/JPS508131A/ja
Publication of JPS5323543B2 publication Critical patent/JPS5323543B2/ja
Expired legal-status Critical Current

Links

JP5867673A 1973-05-28 1973-05-28 Expired JPS5323543B2 (US20020095090A1-20020718-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5867673A JPS5323543B2 (US20020095090A1-20020718-M00002.png) 1973-05-28 1973-05-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5867673A JPS5323543B2 (US20020095090A1-20020718-M00002.png) 1973-05-28 1973-05-28

Publications (2)

Publication Number Publication Date
JPS508131A true JPS508131A (US20020095090A1-20020718-M00002.png) 1975-01-28
JPS5323543B2 JPS5323543B2 (US20020095090A1-20020718-M00002.png) 1978-07-15

Family

ID=13091168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5867673A Expired JPS5323543B2 (US20020095090A1-20020718-M00002.png) 1973-05-28 1973-05-28

Country Status (1)

Country Link
JP (1) JPS5323543B2 (US20020095090A1-20020718-M00002.png)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51142741A (en) * 1975-06-04 1976-12-08 Hitachi Ltd Refrigeration cycle
JPS5252148U (US20020095090A1-20020718-M00002.png) * 1975-10-13 1977-04-14
JPS5252255A (en) * 1975-10-24 1977-04-26 Hitachi Ltd Refrigerant flow control system
JPS5449663A (en) * 1977-09-26 1979-04-19 Sanyo Electric Co Ltd Coolant-noise reducing apparatus
JPH02166366A (ja) * 1988-12-20 1990-06-27 Matsushita Refrig Co Ltd 冷媒分流器
JPH02275266A (ja) * 1989-04-17 1990-11-09 Matsushita Refrig Co Ltd 冷媒分流器
JPH02306070A (ja) * 1989-05-19 1990-12-19 Matsushita Refrig Co Ltd 冷媒分流器
JPH0379973A (ja) * 1989-08-18 1991-04-04 Matsushita Refrig Co Ltd 分流器
CN1304247C (zh) * 2003-09-26 2007-03-14 夏普株式会社 基片容纳托盘平板架及基片传送系统

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51142741A (en) * 1975-06-04 1976-12-08 Hitachi Ltd Refrigeration cycle
JPS5252148U (US20020095090A1-20020718-M00002.png) * 1975-10-13 1977-04-14
JPS5252255A (en) * 1975-10-24 1977-04-26 Hitachi Ltd Refrigerant flow control system
JPS5449663A (en) * 1977-09-26 1979-04-19 Sanyo Electric Co Ltd Coolant-noise reducing apparatus
JPH02166366A (ja) * 1988-12-20 1990-06-27 Matsushita Refrig Co Ltd 冷媒分流器
JPH02275266A (ja) * 1989-04-17 1990-11-09 Matsushita Refrig Co Ltd 冷媒分流器
JPH02306070A (ja) * 1989-05-19 1990-12-19 Matsushita Refrig Co Ltd 冷媒分流器
JPH0379973A (ja) * 1989-08-18 1991-04-04 Matsushita Refrig Co Ltd 分流器
CN1304247C (zh) * 2003-09-26 2007-03-14 夏普株式会社 基片容纳托盘平板架及基片传送系统

Also Published As

Publication number Publication date
JPS5323543B2 (US20020095090A1-20020718-M00002.png) 1978-07-15

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