JPS508131A - - Google Patents
Info
- Publication number
- JPS508131A JPS508131A JP48058676A JP5867673A JPS508131A JP S508131 A JPS508131 A JP S508131A JP 48058676 A JP48058676 A JP 48058676A JP 5867673 A JP5867673 A JP 5867673A JP S508131 A JPS508131 A JP S508131A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5867673A JPS5323543B2 (US20020095090A1-20020718-M00002.png) | 1973-05-28 | 1973-05-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5867673A JPS5323543B2 (US20020095090A1-20020718-M00002.png) | 1973-05-28 | 1973-05-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS508131A true JPS508131A (US20020095090A1-20020718-M00002.png) | 1975-01-28 |
JPS5323543B2 JPS5323543B2 (US20020095090A1-20020718-M00002.png) | 1978-07-15 |
Family
ID=13091168
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5867673A Expired JPS5323543B2 (US20020095090A1-20020718-M00002.png) | 1973-05-28 | 1973-05-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5323543B2 (US20020095090A1-20020718-M00002.png) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51142741A (en) * | 1975-06-04 | 1976-12-08 | Hitachi Ltd | Refrigeration cycle |
JPS5252148U (US20020095090A1-20020718-M00002.png) * | 1975-10-13 | 1977-04-14 | ||
JPS5252255A (en) * | 1975-10-24 | 1977-04-26 | Hitachi Ltd | Refrigerant flow control system |
JPS5449663A (en) * | 1977-09-26 | 1979-04-19 | Sanyo Electric Co Ltd | Coolant-noise reducing apparatus |
JPH02166366A (ja) * | 1988-12-20 | 1990-06-27 | Matsushita Refrig Co Ltd | 冷媒分流器 |
JPH02275266A (ja) * | 1989-04-17 | 1990-11-09 | Matsushita Refrig Co Ltd | 冷媒分流器 |
JPH02306070A (ja) * | 1989-05-19 | 1990-12-19 | Matsushita Refrig Co Ltd | 冷媒分流器 |
JPH0379973A (ja) * | 1989-08-18 | 1991-04-04 | Matsushita Refrig Co Ltd | 分流器 |
CN1304247C (zh) * | 2003-09-26 | 2007-03-14 | 夏普株式会社 | 基片容纳托盘平板架及基片传送系统 |
-
1973
- 1973-05-28 JP JP5867673A patent/JPS5323543B2/ja not_active Expired
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51142741A (en) * | 1975-06-04 | 1976-12-08 | Hitachi Ltd | Refrigeration cycle |
JPS5252148U (US20020095090A1-20020718-M00002.png) * | 1975-10-13 | 1977-04-14 | ||
JPS5252255A (en) * | 1975-10-24 | 1977-04-26 | Hitachi Ltd | Refrigerant flow control system |
JPS5449663A (en) * | 1977-09-26 | 1979-04-19 | Sanyo Electric Co Ltd | Coolant-noise reducing apparatus |
JPH02166366A (ja) * | 1988-12-20 | 1990-06-27 | Matsushita Refrig Co Ltd | 冷媒分流器 |
JPH02275266A (ja) * | 1989-04-17 | 1990-11-09 | Matsushita Refrig Co Ltd | 冷媒分流器 |
JPH02306070A (ja) * | 1989-05-19 | 1990-12-19 | Matsushita Refrig Co Ltd | 冷媒分流器 |
JPH0379973A (ja) * | 1989-08-18 | 1991-04-04 | Matsushita Refrig Co Ltd | 分流器 |
CN1304247C (zh) * | 2003-09-26 | 2007-03-14 | 夏普株式会社 | 基片容纳托盘平板架及基片传送系统 |
Also Published As
Publication number | Publication date |
---|---|
JPS5323543B2 (US20020095090A1-20020718-M00002.png) | 1978-07-15 |