JPS5079380A - - Google Patents

Info

Publication number
JPS5079380A
JPS5079380A JP12709473A JP12709473A JPS5079380A JP S5079380 A JPS5079380 A JP S5079380A JP 12709473 A JP12709473 A JP 12709473A JP 12709473 A JP12709473 A JP 12709473A JP S5079380 A JPS5079380 A JP S5079380A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12709473A
Other languages
Japanese (ja)
Other versions
JPS5720574B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12709473A priority Critical patent/JPS5720574B2/ja
Publication of JPS5079380A publication Critical patent/JPS5079380A/ja
Publication of JPS5720574B2 publication Critical patent/JPS5720574B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP12709473A 1973-11-12 1973-11-12 Expired JPS5720574B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12709473A JPS5720574B2 (enrdf_load_stackoverflow) 1973-11-12 1973-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12709473A JPS5720574B2 (enrdf_load_stackoverflow) 1973-11-12 1973-11-12

Publications (2)

Publication Number Publication Date
JPS5079380A true JPS5079380A (enrdf_load_stackoverflow) 1975-06-27
JPS5720574B2 JPS5720574B2 (enrdf_load_stackoverflow) 1982-04-30

Family

ID=14951422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12709473A Expired JPS5720574B2 (enrdf_load_stackoverflow) 1973-11-12 1973-11-12

Country Status (1)

Country Link
JP (1) JPS5720574B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61223541A (ja) * 1985-03-28 1986-10-04 Toshiba Corp 表面検査方法および装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61223541A (ja) * 1985-03-28 1986-10-04 Toshiba Corp 表面検査方法および装置

Also Published As

Publication number Publication date
JPS5720574B2 (enrdf_load_stackoverflow) 1982-04-30

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