JPS5079274A - - Google Patents
Info
- Publication number
- JPS5079274A JPS5079274A JP12650073A JP12650073A JPS5079274A JP S5079274 A JPS5079274 A JP S5079274A JP 12650073 A JP12650073 A JP 12650073A JP 12650073 A JP12650073 A JP 12650073A JP S5079274 A JPS5079274 A JP S5079274A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12650073A JPS5079274A (ja) | 1973-11-10 | 1973-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12650073A JPS5079274A (ja) | 1973-11-10 | 1973-11-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5079274A true JPS5079274A (ja) | 1975-06-27 |
Family
ID=14936731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12650073A Pending JPS5079274A (ja) | 1973-11-10 | 1973-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5079274A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03101247A (ja) * | 1988-11-30 | 1991-04-26 | Tokyo Electron Ltd | 処理装置 |
-
1973
- 1973-11-10 JP JP12650073A patent/JPS5079274A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03101247A (ja) * | 1988-11-30 | 1991-04-26 | Tokyo Electron Ltd | 処理装置 |