JPS5076987A - - Google Patents
Info
- Publication number
- JPS5076987A JPS5076987A JP12578773A JP12578773A JPS5076987A JP S5076987 A JPS5076987 A JP S5076987A JP 12578773 A JP12578773 A JP 12578773A JP 12578773 A JP12578773 A JP 12578773A JP S5076987 A JPS5076987 A JP S5076987A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12578773A JPS5076987A (en) | 1973-11-08 | 1973-11-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12578773A JPS5076987A (en) | 1973-11-08 | 1973-11-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5076987A true JPS5076987A (en) | 1975-06-24 |
Family
ID=14918837
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12578773A Pending JPS5076987A (en) | 1973-11-08 | 1973-11-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5076987A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021509775A (en) * | 2018-01-08 | 2021-04-01 | バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド | Techniques for improving sacrificial mask removal |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4880440A (en) * | 1972-02-02 | 1973-10-27 |
-
1973
- 1973-11-08 JP JP12578773A patent/JPS5076987A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4880440A (en) * | 1972-02-02 | 1973-10-27 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021509775A (en) * | 2018-01-08 | 2021-04-01 | バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド | Techniques for improving sacrificial mask removal |