JPS5075370A - - Google Patents
Info
- Publication number
- JPS5075370A JPS5075370A JP12342873A JP12342873A JPS5075370A JP S5075370 A JPS5075370 A JP S5075370A JP 12342873 A JP12342873 A JP 12342873A JP 12342873 A JP12342873 A JP 12342873A JP S5075370 A JPS5075370 A JP S5075370A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12342873A JPS5075370A (en) | 1973-11-05 | 1973-11-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12342873A JPS5075370A (en) | 1973-11-05 | 1973-11-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5075370A true JPS5075370A (en) | 1975-06-20 |
Family
ID=14860309
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12342873A Pending JPS5075370A (en) | 1973-11-05 | 1973-11-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5075370A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7648782B2 (en) | 2006-03-20 | 2010-01-19 | Tokyo Electron Limited | Ceramic coating member for semiconductor processing apparatus |
US7767268B2 (en) | 2005-09-08 | 2010-08-03 | Tocalo Co., Ltd. | Spray-coated member having an excellent resistance to plasma erosion and method of producing the same |
US7850864B2 (en) | 2006-03-20 | 2010-12-14 | Tokyo Electron Limited | Plasma treating apparatus and plasma treating method |
US8231986B2 (en) | 2005-08-22 | 2012-07-31 | Tocalo Co., Ltd. | Spray coating member having excellent injury resistance and so on and method for producing the same |
-
1973
- 1973-11-05 JP JP12342873A patent/JPS5075370A/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8231986B2 (en) | 2005-08-22 | 2012-07-31 | Tocalo Co., Ltd. | Spray coating member having excellent injury resistance and so on and method for producing the same |
US7767268B2 (en) | 2005-09-08 | 2010-08-03 | Tocalo Co., Ltd. | Spray-coated member having an excellent resistance to plasma erosion and method of producing the same |
US8053058B2 (en) | 2005-09-08 | 2011-11-08 | Tocalo Co., Ltd. | Spray-coated member having an excellent resistance to plasma erosion and method of producing the same |
US7648782B2 (en) | 2006-03-20 | 2010-01-19 | Tokyo Electron Limited | Ceramic coating member for semiconductor processing apparatus |
US7850864B2 (en) | 2006-03-20 | 2010-12-14 | Tokyo Electron Limited | Plasma treating apparatus and plasma treating method |