JPS5074982A - - Google Patents
Info
- Publication number
- JPS5074982A JPS5074982A JP48122761A JP12276173A JPS5074982A JP S5074982 A JPS5074982 A JP S5074982A JP 48122761 A JP48122761 A JP 48122761A JP 12276173 A JP12276173 A JP 12276173A JP S5074982 A JPS5074982 A JP S5074982A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48122761A JPS604591B2 (ja) | 1973-11-02 | 1973-11-02 | 半導体集積回路装置 |
| US05/519,683 US3961357A (en) | 1973-11-02 | 1974-10-31 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48122761A JPS604591B2 (ja) | 1973-11-02 | 1973-11-02 | 半導体集積回路装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5074982A true JPS5074982A (ja) | 1975-06-19 |
| JPS604591B2 JPS604591B2 (ja) | 1985-02-05 |
Family
ID=14843948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48122761A Expired JPS604591B2 (ja) | 1973-11-02 | 1973-11-02 | 半導体集積回路装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3961357A (ja) |
| JP (1) | JPS604591B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58131749A (ja) * | 1982-02-01 | 1983-08-05 | Hitachi Ltd | 半導体集積回路装置 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6191974A (ja) * | 1984-10-11 | 1986-05-10 | Kanegafuchi Chem Ind Co Ltd | 耐熱性マルチジヤンクシヨン型半導体素子 |
| KR100213201B1 (ko) | 1996-05-15 | 1999-08-02 | 윤종용 | 씨모스 트랜지스터 및 그 제조방법 |
| DE19840032C1 (de) | 1998-09-02 | 1999-11-18 | Siemens Ag | Halbleiterbauelement und Herstellungsverfahren dazu |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3829889A (en) * | 1963-12-16 | 1974-08-13 | Signetics Corp | Semiconductor structure |
| US3648128A (en) * | 1968-05-25 | 1972-03-07 | Sony Corp | An integrated complementary transistor circuit chip with polycrystalline contact to buried collector regions |
| US3736193A (en) * | 1970-10-26 | 1973-05-29 | Fairchild Camera Instr Co | Single crystal-polycrystalline process for electrical isolation in integrated circuits |
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1973
- 1973-11-02 JP JP48122761A patent/JPS604591B2/ja not_active Expired
-
1974
- 1974-10-31 US US05/519,683 patent/US3961357A/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58131749A (ja) * | 1982-02-01 | 1983-08-05 | Hitachi Ltd | 半導体集積回路装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US3961357A (en) | 1976-06-01 |
| JPS604591B2 (ja) | 1985-02-05 |