JPS5073581A - - Google Patents
Info
- Publication number
- JPS5073581A JPS5073581A JP48122058A JP12205873A JPS5073581A JP S5073581 A JPS5073581 A JP S5073581A JP 48122058 A JP48122058 A JP 48122058A JP 12205873 A JP12205873 A JP 12205873A JP S5073581 A JPS5073581 A JP S5073581A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48122058A JPS604590B2 (ja) | 1973-10-30 | 1973-10-30 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48122058A JPS604590B2 (ja) | 1973-10-30 | 1973-10-30 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5073581A true JPS5073581A (enExample) | 1975-06-17 |
| JPS604590B2 JPS604590B2 (ja) | 1985-02-05 |
Family
ID=14826566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48122058A Expired JPS604590B2 (ja) | 1973-10-30 | 1973-10-30 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS604590B2 (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS472520A (enExample) * | 1970-07-10 | 1972-02-07 | ||
| JPS472519A (enExample) * | 1970-07-10 | 1972-02-07 |
-
1973
- 1973-10-30 JP JP48122058A patent/JPS604590B2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS472520A (enExample) * | 1970-07-10 | 1972-02-07 | ||
| JPS472519A (enExample) * | 1970-07-10 | 1972-02-07 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS604590B2 (ja) | 1985-02-05 |