JPS5072586A - - Google Patents
Info
- Publication number
- JPS5072586A JPS5072586A JP48120987A JP12098773A JPS5072586A JP S5072586 A JPS5072586 A JP S5072586A JP 48120987 A JP48120987 A JP 48120987A JP 12098773 A JP12098773 A JP 12098773A JP S5072586 A JPS5072586 A JP S5072586A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48120987A JPS5072586A (enExample) | 1973-10-27 | 1973-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48120987A JPS5072586A (enExample) | 1973-10-27 | 1973-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5072586A true JPS5072586A (enExample) | 1975-06-16 |
Family
ID=14799965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48120987A Pending JPS5072586A (enExample) | 1973-10-27 | 1973-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5072586A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55138840A (en) * | 1979-04-17 | 1980-10-30 | Nec Kyushu Ltd | Method of fabricating semiconductor device |
-
1973
- 1973-10-27 JP JP48120987A patent/JPS5072586A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55138840A (en) * | 1979-04-17 | 1980-10-30 | Nec Kyushu Ltd | Method of fabricating semiconductor device |