JPS5070385U - - Google Patents
Info
- Publication number
- JPS5070385U JPS5070385U JP12535173U JP12535173U JPS5070385U JP S5070385 U JPS5070385 U JP S5070385U JP 12535173 U JP12535173 U JP 12535173U JP 12535173 U JP12535173 U JP 12535173U JP S5070385 U JPS5070385 U JP S5070385U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Transmission Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12535173U JPS5228061Y2 (ja) | 1973-10-31 | 1973-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12535173U JPS5228061Y2 (ja) | 1973-10-31 | 1973-10-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5070385U true JPS5070385U (ja) | 1975-06-21 |
| JPS5228061Y2 JPS5228061Y2 (ja) | 1977-06-25 |
Family
ID=28375630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12535173U Expired JPS5228061Y2 (ja) | 1973-10-31 | 1973-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5228061Y2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014008578A (ja) * | 2012-06-29 | 2014-01-20 | Daihen Corp | 基板搬送装置 |
| JP2018008372A (ja) * | 2017-08-07 | 2018-01-18 | 株式会社ダイヘン | 基板搬送装置 |
-
1973
- 1973-10-31 JP JP12535173U patent/JPS5228061Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014008578A (ja) * | 2012-06-29 | 2014-01-20 | Daihen Corp | 基板搬送装置 |
| JP2018008372A (ja) * | 2017-08-07 | 2018-01-18 | 株式会社ダイヘン | 基板搬送装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5228061Y2 (ja) | 1977-06-25 |