JPS5068475A - - Google Patents

Info

Publication number
JPS5068475A
JPS5068475A JP11684473A JP11684473A JPS5068475A JP S5068475 A JPS5068475 A JP S5068475A JP 11684473 A JP11684473 A JP 11684473A JP 11684473 A JP11684473 A JP 11684473A JP S5068475 A JPS5068475 A JP S5068475A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11684473A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11684473A priority Critical patent/JPS5068475A/ja
Publication of JPS5068475A publication Critical patent/JPS5068475A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP11684473A 1973-10-19 1973-10-19 Pending JPS5068475A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11684473A JPS5068475A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-10-19 1973-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11684473A JPS5068475A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-10-19 1973-10-19

Publications (1)

Publication Number Publication Date
JPS5068475A true JPS5068475A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-06-07

Family

ID=14697012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11684473A Pending JPS5068475A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-10-19 1973-10-19

Country Status (1)

Country Link
JP (1) JPS5068475A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638632U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-09-01 1981-04-11
JPS60193339A (ja) * 1984-03-14 1985-10-01 Fujitsu Ltd レジスト膜塗布方法
JPS61280618A (ja) * 1985-05-17 1986-12-11 Asahi Glass Co Ltd 回転塗布方法および回転塗布装置
JPH05208163A (ja) * 1991-10-29 1993-08-20 Internatl Business Mach Corp <Ibm> スピン・コーティング装置および方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638632U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-09-01 1981-04-11
JPS60193339A (ja) * 1984-03-14 1985-10-01 Fujitsu Ltd レジスト膜塗布方法
JPS61280618A (ja) * 1985-05-17 1986-12-11 Asahi Glass Co Ltd 回転塗布方法および回転塗布装置
JPH05208163A (ja) * 1991-10-29 1993-08-20 Internatl Business Mach Corp <Ibm> スピン・コーティング装置および方法

Similar Documents

Publication Publication Date Title
AU476761B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU465372B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU474593B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU474511B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU474838B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU465453B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU471343B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU465434B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU476714B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AR199451A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU472848B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU466283B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU476696B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS5068475A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU477823B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AR197627A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AR200256A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU477824B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU476873B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BG21153A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU481693A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU479522A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU479521A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU479504A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU479496A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)