JPS5068475A - - Google Patents

Info

Publication number
JPS5068475A
JPS5068475A JP48116844A JP11684473A JPS5068475A JP S5068475 A JPS5068475 A JP S5068475A JP 48116844 A JP48116844 A JP 48116844A JP 11684473 A JP11684473 A JP 11684473A JP S5068475 A JPS5068475 A JP S5068475A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48116844A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48116844A priority Critical patent/JPS5068475A/ja
Publication of JPS5068475A publication Critical patent/JPS5068475A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP48116844A 1973-10-19 1973-10-19 Pending JPS5068475A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48116844A JPS5068475A (ja) 1973-10-19 1973-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48116844A JPS5068475A (ja) 1973-10-19 1973-10-19

Publications (1)

Publication Number Publication Date
JPS5068475A true JPS5068475A (ja) 1975-06-07

Family

ID=14697012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48116844A Pending JPS5068475A (ja) 1973-10-19 1973-10-19

Country Status (1)

Country Link
JP (1) JPS5068475A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638632U (ja) * 1979-09-01 1981-04-11
JPS60193339A (ja) * 1984-03-14 1985-10-01 Fujitsu Ltd レジスト膜塗布方法
JPS61280618A (ja) * 1985-05-17 1986-12-11 Asahi Glass Co Ltd 回転塗布方法および回転塗布装置
JPH05208163A (ja) * 1991-10-29 1993-08-20 Internatl Business Mach Corp <Ibm> スピン・コーティング装置および方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638632U (ja) * 1979-09-01 1981-04-11
JPS60193339A (ja) * 1984-03-14 1985-10-01 Fujitsu Ltd レジスト膜塗布方法
JPS61280618A (ja) * 1985-05-17 1986-12-11 Asahi Glass Co Ltd 回転塗布方法および回転塗布装置
JPH05208163A (ja) * 1991-10-29 1993-08-20 Internatl Business Mach Corp <Ibm> スピン・コーティング装置および方法

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