JPS5067578A - - Google Patents

Info

Publication number
JPS5067578A
JPS5067578A JP11605573A JP11605573A JPS5067578A JP S5067578 A JPS5067578 A JP S5067578A JP 11605573 A JP11605573 A JP 11605573A JP 11605573 A JP11605573 A JP 11605573A JP S5067578 A JPS5067578 A JP S5067578A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11605573A
Other languages
Japanese (ja)
Other versions
JPS5536183B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11605573A priority Critical patent/JPS5536183B2/ja
Publication of JPS5067578A publication Critical patent/JPS5067578A/ja
Publication of JPS5536183B2 publication Critical patent/JPS5536183B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP11605573A 1973-10-15 1973-10-15 Expired JPS5536183B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11605573A JPS5536183B2 (cs) 1973-10-15 1973-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11605573A JPS5536183B2 (cs) 1973-10-15 1973-10-15

Publications (2)

Publication Number Publication Date
JPS5067578A true JPS5067578A (cs) 1975-06-06
JPS5536183B2 JPS5536183B2 (cs) 1980-09-19

Family

ID=14677573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11605573A Expired JPS5536183B2 (cs) 1973-10-15 1973-10-15

Country Status (1)

Country Link
JP (1) JPS5536183B2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5246903A (en) * 1975-10-08 1977-04-14 Mitsubishi Electric Corp Rotary coating apparatus
JPS5349955A (en) * 1976-10-18 1978-05-06 Fuji Photo Film Co Ltd Spin coating method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4831874A (cs) * 1971-08-27 1973-04-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4831874A (cs) * 1971-08-27 1973-04-26

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5246903A (en) * 1975-10-08 1977-04-14 Mitsubishi Electric Corp Rotary coating apparatus
JPS5349955A (en) * 1976-10-18 1978-05-06 Fuji Photo Film Co Ltd Spin coating method

Also Published As

Publication number Publication date
JPS5536183B2 (cs) 1980-09-19

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