JPS5067555A - - Google Patents
Info
- Publication number
- JPS5067555A JPS5067555A JP11478873A JP11478873A JPS5067555A JP S5067555 A JPS5067555 A JP S5067555A JP 11478873 A JP11478873 A JP 11478873A JP 11478873 A JP11478873 A JP 11478873A JP S5067555 A JPS5067555 A JP S5067555A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11478873A JPS5067555A (en) | 1973-10-15 | 1973-10-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11478873A JPS5067555A (en) | 1973-10-15 | 1973-10-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5067555A true JPS5067555A (en) | 1975-06-06 |
Family
ID=14646682
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11478873A Pending JPS5067555A (en) | 1973-10-15 | 1973-10-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5067555A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5234666A (en) * | 1975-07-31 | 1977-03-16 | Matsushita Electronics Corp | Semi-conductor wafer processing |
JPS5435854U (en) * | 1977-08-15 | 1979-03-08 | ||
JPS59208717A (en) * | 1983-05-12 | 1984-11-27 | Matsushita Electric Ind Co Ltd | Infrared annealing apparatus |
-
1973
- 1973-10-15 JP JP11478873A patent/JPS5067555A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5234666A (en) * | 1975-07-31 | 1977-03-16 | Matsushita Electronics Corp | Semi-conductor wafer processing |
JPS5435854U (en) * | 1977-08-15 | 1979-03-08 | ||
JPS59208717A (en) * | 1983-05-12 | 1984-11-27 | Matsushita Electric Ind Co Ltd | Infrared annealing apparatus |