JPS5065254A - - Google Patents

Info

Publication number
JPS5065254A
JPS5065254A JP11281673A JP11281673A JPS5065254A JP S5065254 A JPS5065254 A JP S5065254A JP 11281673 A JP11281673 A JP 11281673A JP 11281673 A JP11281673 A JP 11281673A JP S5065254 A JPS5065254 A JP S5065254A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11281673A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11281673A priority Critical patent/JPS5065254A/ja
Publication of JPS5065254A publication Critical patent/JPS5065254A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP11281673A 1973-10-09 1973-10-09 Pending JPS5065254A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11281673A JPS5065254A (en) 1973-10-09 1973-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11281673A JPS5065254A (en) 1973-10-09 1973-10-09

Publications (1)

Publication Number Publication Date
JPS5065254A true JPS5065254A (en) 1975-06-02

Family

ID=14596236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11281673A Pending JPS5065254A (en) 1973-10-09 1973-10-09

Country Status (1)

Country Link
JP (1) JPS5065254A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5746105A (en) * 1980-09-04 1982-03-16 Toshiba Mach Co Ltd Optical chatter measurement
JPS5791403A (en) * 1980-10-04 1982-06-07 Gasuto Teodooru Optoelectronic measuring method of and apparatus for roughness of surface
JPS57113310A (en) * 1980-12-29 1982-07-14 Matsushita Electric Works Ltd Measuring device for surface coarseness of rotary object
JPH01253607A (en) * 1988-02-24 1989-10-09 Erwin Sick Gmbh Opt Elektron Optical detection method and apparatus for surface roughness of material surface

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5746105A (en) * 1980-09-04 1982-03-16 Toshiba Mach Co Ltd Optical chatter measurement
JPH0151761B2 (en) * 1980-09-04 1989-11-06 Toshiba Machine Co Ltd
JPS5791403A (en) * 1980-10-04 1982-06-07 Gasuto Teodooru Optoelectronic measuring method of and apparatus for roughness of surface
JPH0153401B2 (en) * 1980-10-04 1989-11-14 Gasuto Teodooru
JPS57113310A (en) * 1980-12-29 1982-07-14 Matsushita Electric Works Ltd Measuring device for surface coarseness of rotary object
JPH0337125B2 (en) * 1980-12-29 1991-06-04 Matsushita Electric Works Ltd
JPH01253607A (en) * 1988-02-24 1989-10-09 Erwin Sick Gmbh Opt Elektron Optical detection method and apparatus for surface roughness of material surface

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