JPS5065172A - - Google Patents
Info
- Publication number
- JPS5065172A JPS5065172A JP11347573A JP11347573A JPS5065172A JP S5065172 A JPS5065172 A JP S5065172A JP 11347573 A JP11347573 A JP 11347573A JP 11347573 A JP11347573 A JP 11347573A JP S5065172 A JPS5065172 A JP S5065172A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Die Bonding (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11347573A JPS5065172A (en) | 1973-10-09 | 1973-10-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11347573A JPS5065172A (en) | 1973-10-09 | 1973-10-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5065172A true JPS5065172A (en) | 1975-06-02 |
Family
ID=14613192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11347573A Pending JPS5065172A (en) | 1973-10-09 | 1973-10-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5065172A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5570041A (en) * | 1978-11-21 | 1980-05-27 | Toshiba Corp | Apparatus for fabricating semiconductor device |
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1973
- 1973-10-09 JP JP11347573A patent/JPS5065172A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5570041A (en) * | 1978-11-21 | 1980-05-27 | Toshiba Corp | Apparatus for fabricating semiconductor device |
JPS596058B2 (en) * | 1978-11-21 | 1984-02-08 | 株式会社東芝 | Semiconductor device manufacturing equipment |