JPS5057590A - - Google Patents
Info
- Publication number
- JPS5057590A JPS5057590A JP10664573A JP10664573A JPS5057590A JP S5057590 A JPS5057590 A JP S5057590A JP 10664573 A JP10664573 A JP 10664573A JP 10664573 A JP10664573 A JP 10664573A JP S5057590 A JPS5057590 A JP S5057590A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10664573A JPS5227037B2 (enExample) | 1973-09-20 | 1973-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10664573A JPS5227037B2 (enExample) | 1973-09-20 | 1973-09-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5057590A true JPS5057590A (enExample) | 1975-05-20 |
| JPS5227037B2 JPS5227037B2 (enExample) | 1977-07-18 |
Family
ID=14438846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10664573A Expired JPS5227037B2 (enExample) | 1973-09-20 | 1973-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5227037B2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5457865A (en) * | 1977-10-17 | 1979-05-10 | Hitachi Ltd | Manufacture of semiconductor device |
| JPS57162456A (en) * | 1981-03-31 | 1982-10-06 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1973
- 1973-09-20 JP JP10664573A patent/JPS5227037B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5457865A (en) * | 1977-10-17 | 1979-05-10 | Hitachi Ltd | Manufacture of semiconductor device |
| JPS57162456A (en) * | 1981-03-31 | 1982-10-06 | Fujitsu Ltd | Manufacture of semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5227037B2 (enExample) | 1977-07-18 |