JPS5057475A - - Google Patents
Info
- Publication number
- JPS5057475A JPS5057475A JP10271873A JP10271873A JPS5057475A JP S5057475 A JPS5057475 A JP S5057475A JP 10271873 A JP10271873 A JP 10271873A JP 10271873 A JP10271873 A JP 10271873A JP S5057475 A JPS5057475 A JP S5057475A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10271873A JPS5057475A (ja) | 1973-09-13 | 1973-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10271873A JPS5057475A (ja) | 1973-09-13 | 1973-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5057475A true JPS5057475A (ja) | 1975-05-19 |
Family
ID=14335032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10271873A Pending JPS5057475A (ja) | 1973-09-13 | 1973-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5057475A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008532782A (ja) * | 2005-03-18 | 2008-08-21 | シルマック | 半導体のエッチングによって形成された作動部品を使用する被駆動部品を移動させる方法および装置 |
| JP2009529429A (ja) * | 2005-03-18 | 2009-08-20 | シルマック | 半導体材料のエッチングによって形成された作動部品を使用して駆動部品を移動させる方法及び装置 |
-
1973
- 1973-09-13 JP JP10271873A patent/JPS5057475A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008532782A (ja) * | 2005-03-18 | 2008-08-21 | シルマック | 半導体のエッチングによって形成された作動部品を使用する被駆動部品を移動させる方法および装置 |
| JP2009529429A (ja) * | 2005-03-18 | 2009-08-20 | シルマック | 半導体材料のエッチングによって形成された作動部品を使用して駆動部品を移動させる方法及び装置 |