JPS5057180A - - Google Patents
Info
- Publication number
- JPS5057180A JPS5057180A JP10522173A JP10522173A JPS5057180A JP S5057180 A JPS5057180 A JP S5057180A JP 10522173 A JP10522173 A JP 10522173A JP 10522173 A JP10522173 A JP 10522173A JP S5057180 A JPS5057180 A JP S5057180A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Weting (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48105221A JPS584453B2 (ja) | 1973-09-18 | 1973-09-18 | ハンドウタイウエハ− ノ エキシヨリソウチ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48105221A JPS584453B2 (ja) | 1973-09-18 | 1973-09-18 | ハンドウタイウエハ− ノ エキシヨリソウチ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5057180A true JPS5057180A (da) | 1975-05-19 |
| JPS584453B2 JPS584453B2 (ja) | 1983-01-26 |
Family
ID=14401598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48105221A Expired JPS584453B2 (ja) | 1973-09-18 | 1973-09-18 | ハンドウタイウエハ− ノ エキシヨリソウチ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS584453B2 (da) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5310274U (da) * | 1976-07-09 | 1978-01-27 | ||
| JPS53149566U (da) * | 1977-04-28 | 1978-11-25 | ||
| JPS5444472A (en) * | 1977-09-14 | 1979-04-07 | Nippon Telegr & Teleph Corp <Ntt> | Cleaning unit of semiconductor substrate |
| JPS58135643A (ja) * | 1982-02-08 | 1983-08-12 | Nippon Telegr & Teleph Corp <Ntt> | ウエハ洗浄装置 |
| JPS5929424A (ja) * | 1982-08-11 | 1984-02-16 | Nec Corp | 半導体ウエハ−製造装置 |
| JPS5977225U (ja) * | 1982-11-15 | 1984-05-25 | ソニー株式会社 | 半導体素子製造装置 |
| JPS6273543U (da) * | 1985-10-25 | 1987-05-11 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59182099A (ja) * | 1983-03-31 | 1984-10-16 | 小島プレス工業株式会社 | クリツプピンの切断処理装置 |
-
1973
- 1973-09-18 JP JP48105221A patent/JPS584453B2/ja not_active Expired
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5310274U (da) * | 1976-07-09 | 1978-01-27 | ||
| JPS53149566U (da) * | 1977-04-28 | 1978-11-25 | ||
| JPS5923416Y2 (ja) * | 1977-04-28 | 1984-07-12 | 日本電気株式会社 | 液処理装置 |
| JPS5444472A (en) * | 1977-09-14 | 1979-04-07 | Nippon Telegr & Teleph Corp <Ntt> | Cleaning unit of semiconductor substrate |
| JPS58135643A (ja) * | 1982-02-08 | 1983-08-12 | Nippon Telegr & Teleph Corp <Ntt> | ウエハ洗浄装置 |
| JPH045264B2 (da) * | 1982-02-08 | 1992-01-30 | ||
| JPS5929424A (ja) * | 1982-08-11 | 1984-02-16 | Nec Corp | 半導体ウエハ−製造装置 |
| JPS5977225U (ja) * | 1982-11-15 | 1984-05-25 | ソニー株式会社 | 半導体素子製造装置 |
| JPH0128671Y2 (da) * | 1982-11-15 | 1989-08-31 | ||
| JPS6273543U (da) * | 1985-10-25 | 1987-05-11 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS584453B2 (ja) | 1983-01-26 |