JPS5057180A - - Google Patents

Info

Publication number
JPS5057180A
JPS5057180A JP10522173A JP10522173A JPS5057180A JP S5057180 A JPS5057180 A JP S5057180A JP 10522173 A JP10522173 A JP 10522173A JP 10522173 A JP10522173 A JP 10522173A JP S5057180 A JPS5057180 A JP S5057180A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10522173A
Other languages
Japanese (ja)
Other versions
JPS584453B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48105221A priority Critical patent/JPS584453B2/ja
Publication of JPS5057180A publication Critical patent/JPS5057180A/ja
Publication of JPS584453B2 publication Critical patent/JPS584453B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP48105221A 1973-09-18 1973-09-18 ハンドウタイウエハ− ノ エキシヨリソウチ Expired JPS584453B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48105221A JPS584453B2 (ja) 1973-09-18 1973-09-18 ハンドウタイウエハ− ノ エキシヨリソウチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48105221A JPS584453B2 (ja) 1973-09-18 1973-09-18 ハンドウタイウエハ− ノ エキシヨリソウチ

Publications (2)

Publication Number Publication Date
JPS5057180A true JPS5057180A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-05-19
JPS584453B2 JPS584453B2 (ja) 1983-01-26

Family

ID=14401598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48105221A Expired JPS584453B2 (ja) 1973-09-18 1973-09-18 ハンドウタイウエハ− ノ エキシヨリソウチ

Country Status (1)

Country Link
JP (1) JPS584453B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5310274U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-07-09 1978-01-27
JPS53149566U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-04-28 1978-11-25
JPS5444472A (en) * 1977-09-14 1979-04-07 Nippon Telegr & Teleph Corp <Ntt> Cleaning unit of semiconductor substrate
JPS58135643A (ja) * 1982-02-08 1983-08-12 Nippon Telegr & Teleph Corp <Ntt> ウエハ洗浄装置
JPS5929424A (ja) * 1982-08-11 1984-02-16 Nec Corp 半導体ウエハ−製造装置
JPS5977225U (ja) * 1982-11-15 1984-05-25 ソニー株式会社 半導体素子製造装置
JPS6273543U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-10-25 1987-05-11

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59182099A (ja) * 1983-03-31 1984-10-16 小島プレス工業株式会社 クリツプピンの切断処理装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5310274U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-07-09 1978-01-27
JPS53149566U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-04-28 1978-11-25
JPS5444472A (en) * 1977-09-14 1979-04-07 Nippon Telegr & Teleph Corp <Ntt> Cleaning unit of semiconductor substrate
JPS58135643A (ja) * 1982-02-08 1983-08-12 Nippon Telegr & Teleph Corp <Ntt> ウエハ洗浄装置
JPS5929424A (ja) * 1982-08-11 1984-02-16 Nec Corp 半導体ウエハ−製造装置
JPS5977225U (ja) * 1982-11-15 1984-05-25 ソニー株式会社 半導体素子製造装置
JPS6273543U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-10-25 1987-05-11

Also Published As

Publication number Publication date
JPS584453B2 (ja) 1983-01-26

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