JPS5056155A - - Google Patents

Info

Publication number
JPS5056155A
JPS5056155A JP10356673A JP10356673A JPS5056155A JP S5056155 A JPS5056155 A JP S5056155A JP 10356673 A JP10356673 A JP 10356673A JP 10356673 A JP10356673 A JP 10356673A JP S5056155 A JPS5056155 A JP S5056155A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10356673A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10356673A priority Critical patent/JPS5056155A/ja
Publication of JPS5056155A publication Critical patent/JPS5056155A/ja
Pending legal-status Critical Current

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Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
JP10356673A 1973-09-13 1973-09-13 Pending JPS5056155A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10356673A JPS5056155A (enrdf_load_stackoverflow) 1973-09-13 1973-09-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10356673A JPS5056155A (enrdf_load_stackoverflow) 1973-09-13 1973-09-13

Publications (1)

Publication Number Publication Date
JPS5056155A true JPS5056155A (enrdf_load_stackoverflow) 1975-05-16

Family

ID=14357341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10356673A Pending JPS5056155A (enrdf_load_stackoverflow) 1973-09-13 1973-09-13

Country Status (1)

Country Link
JP (1) JPS5056155A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3682699A (en) * 1968-10-25 1972-08-08 Hitachi Ltd Method of vapor growth of a semiconductor crystal

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3682699A (en) * 1968-10-25 1972-08-08 Hitachi Ltd Method of vapor growth of a semiconductor crystal

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