JPS49123497A - - Google Patents

Info

Publication number
JPS49123497A
JPS49123497A JP3675473A JP3675473A JPS49123497A JP S49123497 A JPS49123497 A JP S49123497A JP 3675473 A JP3675473 A JP 3675473A JP 3675473 A JP3675473 A JP 3675473A JP S49123497 A JPS49123497 A JP S49123497A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3675473A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3675473A priority Critical patent/JPS49123497A/ja
Publication of JPS49123497A publication Critical patent/JPS49123497A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)
  • Chemical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
JP3675473A 1973-04-02 1973-04-02 Pending JPS49123497A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3675473A JPS49123497A (enrdf_load_stackoverflow) 1973-04-02 1973-04-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3675473A JPS49123497A (enrdf_load_stackoverflow) 1973-04-02 1973-04-02

Publications (1)

Publication Number Publication Date
JPS49123497A true JPS49123497A (enrdf_load_stackoverflow) 1974-11-26

Family

ID=12478511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3675473A Pending JPS49123497A (enrdf_load_stackoverflow) 1973-04-02 1973-04-02

Country Status (1)

Country Link
JP (1) JPS49123497A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5467770A (en) * 1977-11-10 1979-05-31 Kokusai Electric Co Ltd Gas phase growing method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1953247A1 (de) * 1968-10-25 1970-05-14 Hitachi Ltd Verfahren und Vorrichtung zur Sublimation eines Halbleiterkristalls

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1953247A1 (de) * 1968-10-25 1970-05-14 Hitachi Ltd Verfahren und Vorrichtung zur Sublimation eines Halbleiterkristalls

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5467770A (en) * 1977-11-10 1979-05-31 Kokusai Electric Co Ltd Gas phase growing method

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