JPS5054344A - - Google Patents

Info

Publication number
JPS5054344A
JPS5054344A JP10118673A JP10118673A JPS5054344A JP S5054344 A JPS5054344 A JP S5054344A JP 10118673 A JP10118673 A JP 10118673A JP 10118673 A JP10118673 A JP 10118673A JP S5054344 A JPS5054344 A JP S5054344A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10118673A
Other languages
Japanese (ja)
Other versions
JPS5628244B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10118673A priority Critical patent/JPS5628244B2/ja
Publication of JPS5054344A publication Critical patent/JPS5054344A/ja
Publication of JPS5628244B2 publication Critical patent/JPS5628244B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Focusing (AREA)
  • Lens Barrels (AREA)
  • Microscoopes, Condenser (AREA)
  • Automatic Focus Adjustment (AREA)
JP10118673A 1973-09-10 1973-09-10 Expired JPS5628244B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10118673A JPS5628244B2 (enrdf_load_stackoverflow) 1973-09-10 1973-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10118673A JPS5628244B2 (enrdf_load_stackoverflow) 1973-09-10 1973-09-10

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP5544282A Division JPS57201208A (en) 1982-04-05 1982-04-05 Autofocusing device

Publications (2)

Publication Number Publication Date
JPS5054344A true JPS5054344A (enrdf_load_stackoverflow) 1975-05-14
JPS5628244B2 JPS5628244B2 (enrdf_load_stackoverflow) 1981-06-30

Family

ID=14293936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10118673A Expired JPS5628244B2 (enrdf_load_stackoverflow) 1973-09-10 1973-09-10

Country Status (1)

Country Link
JP (1) JPS5628244B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6027138A (ja) * 1983-07-25 1985-02-12 Nec Kyushu Ltd 半導体装置用外観検査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS444858Y1 (enrdf_load_stackoverflow) * 1968-09-13 1969-02-21
JPS4412421Y1 (enrdf_load_stackoverflow) * 1966-03-04 1969-05-23

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4412421Y1 (enrdf_load_stackoverflow) * 1966-03-04 1969-05-23
JPS444858Y1 (enrdf_load_stackoverflow) * 1968-09-13 1969-02-21

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6027138A (ja) * 1983-07-25 1985-02-12 Nec Kyushu Ltd 半導体装置用外観検査装置

Also Published As

Publication number Publication date
JPS5628244B2 (enrdf_load_stackoverflow) 1981-06-30

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