JPS5051671A - - Google Patents
Info
- Publication number
- JPS5051671A JPS5051671A JP10132473A JP10132473A JPS5051671A JP S5051671 A JPS5051671 A JP S5051671A JP 10132473 A JP10132473 A JP 10132473A JP 10132473 A JP10132473 A JP 10132473A JP S5051671 A JPS5051671 A JP S5051671A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10132473A JPS5051671A (ja) | 1973-09-07 | 1973-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10132473A JPS5051671A (ja) | 1973-09-07 | 1973-09-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5051671A true JPS5051671A (ja) | 1975-05-08 |
Family
ID=14297625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10132473A Pending JPS5051671A (ja) | 1973-09-07 | 1973-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5051671A (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5244177A (en) * | 1975-10-01 | 1977-04-06 | Ibm | System for transferring pieces under treatment |
| JPS5333067A (en) * | 1976-09-07 | 1978-03-28 | Ibm | Chuck for holding flat workpiece |
| JPS5645017A (en) * | 1979-09-20 | 1981-04-24 | Toshiba Corp | Moving method and apparatus for semiconductor wafer |
-
1973
- 1973-09-07 JP JP10132473A patent/JPS5051671A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5244177A (en) * | 1975-10-01 | 1977-04-06 | Ibm | System for transferring pieces under treatment |
| JPS5410829B2 (ja) * | 1975-10-01 | 1979-05-10 | ||
| JPS5333067A (en) * | 1976-09-07 | 1978-03-28 | Ibm | Chuck for holding flat workpiece |
| JPS5410831B2 (ja) * | 1976-09-07 | 1979-05-10 | ||
| JPS5645017A (en) * | 1979-09-20 | 1981-04-24 | Toshiba Corp | Moving method and apparatus for semiconductor wafer |
| JPS5846170B2 (ja) * | 1979-09-20 | 1983-10-14 | 株式会社東芝 | 半導体ウェファ−の搬送方法および搬送装置 |