JPS5051671A - - Google Patents

Info

Publication number
JPS5051671A
JPS5051671A JP10132473A JP10132473A JPS5051671A JP S5051671 A JPS5051671 A JP S5051671A JP 10132473 A JP10132473 A JP 10132473A JP 10132473 A JP10132473 A JP 10132473A JP S5051671 A JPS5051671 A JP S5051671A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10132473A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10132473A priority Critical patent/JPS5051671A/ja
Publication of JPS5051671A publication Critical patent/JPS5051671A/ja
Pending legal-status Critical Current

Links

JP10132473A 1973-09-07 1973-09-07 Pending JPS5051671A (Direct)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10132473A JPS5051671A (Direct) 1973-09-07 1973-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10132473A JPS5051671A (Direct) 1973-09-07 1973-09-07

Publications (1)

Publication Number Publication Date
JPS5051671A true JPS5051671A (Direct) 1975-05-08

Family

ID=14297625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10132473A Pending JPS5051671A (Direct) 1973-09-07 1973-09-07

Country Status (1)

Country Link
JP (1) JPS5051671A (Direct)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244177A (en) * 1975-10-01 1977-04-06 Ibm System for transferring pieces under treatment
JPS5333067A (en) * 1976-09-07 1978-03-28 Ibm Chuck for holding flat workpiece
JPS5645017A (en) * 1979-09-20 1981-04-24 Toshiba Corp Moving method and apparatus for semiconductor wafer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244177A (en) * 1975-10-01 1977-04-06 Ibm System for transferring pieces under treatment
JPS5333067A (en) * 1976-09-07 1978-03-28 Ibm Chuck for holding flat workpiece
JPS5645017A (en) * 1979-09-20 1981-04-24 Toshiba Corp Moving method and apparatus for semiconductor wafer

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