JPS5051476A - - Google Patents

Info

Publication number
JPS5051476A
JPS5051476A JP9779874A JP9779874A JPS5051476A JP S5051476 A JPS5051476 A JP S5051476A JP 9779874 A JP9779874 A JP 9779874A JP 9779874 A JP9779874 A JP 9779874A JP S5051476 A JPS5051476 A JP S5051476A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9779874A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5051476A publication Critical patent/JPS5051476A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation by radiant heating of the substrate
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/0033—Heating devices using lamps
    • H05B3/0038—Heating devices using lamps for industrial applications
    • H05B3/0061—Heating devices using lamps for industrial applications for metal treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Toxicology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Chemical Vapour Deposition (AREA)
JP9779874A 1973-08-29 1974-08-26 Pending JPS5051476A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732343499 DE2343499C3 (de) 1973-08-29 1973-08-29 Verfahren und Vorrichtung zum Metallisieren von bewegtem flächigem Gut

Publications (1)

Publication Number Publication Date
JPS5051476A true JPS5051476A (de) 1975-05-08

Family

ID=5891018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9779874A Pending JPS5051476A (de) 1973-08-29 1974-08-26

Country Status (6)

Country Link
JP (1) JPS5051476A (de)
CH (1) CH615951A5 (de)
DE (1) DE2343499C3 (de)
FR (1) FR2242484B1 (de)
GB (1) GB1477196A (de)
IT (1) IT1017711B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007314884A (ja) * 1995-08-03 2007-12-06 Asm America Inc 内部支持部材を有するプロセスチャンバ

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4389970A (en) * 1981-03-16 1983-06-28 Energy Conversion Devices, Inc. Apparatus for regulating substrate temperature in a continuous plasma deposition process
US4470369A (en) * 1982-07-12 1984-09-11 Energy Conversion Devices, Inc. Apparatus for uniformly heating a substrate
DE3416502A1 (de) * 1984-05-04 1985-11-07 Goldschmidt Ag Th Vorrichtung zum aushaerten von flaechigen werkstoffen aus durch uv-strahlung haertbaren verbindungen oder zubereitungen
US6093252A (en) * 1995-08-03 2000-07-25 Asm America, Inc. Process chamber with inner support
EP2990171B1 (de) * 2014-08-21 2018-12-05 G.P. Consulting di Giuseppe Pritelli & C. S.a.s. Verfahren und vorrichtung für lokalisiertes thermisches schmelzen

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3160517A (en) * 1961-11-13 1964-12-08 Union Carbide Corp Method of depositing metals and metallic compounds throughout the pores of a porous body

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3160517A (en) * 1961-11-13 1964-12-08 Union Carbide Corp Method of depositing metals and metallic compounds throughout the pores of a porous body

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007314884A (ja) * 1995-08-03 2007-12-06 Asm America Inc 内部支持部材を有するプロセスチャンバ

Also Published As

Publication number Publication date
FR2242484B1 (de) 1977-10-07
DE2343499B2 (de) 1979-10-11
CH615951A5 (en) 1980-02-29
GB1477196A (en) 1977-06-22
DE2343499C3 (de) 1980-07-10
DE2343499A1 (de) 1975-04-10
FR2242484A1 (de) 1975-03-28
IT1017711B (it) 1977-08-10

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