JPS5051474A - - Google Patents
Info
- Publication number
- JPS5051474A JPS5051474A JP10138673A JP10138673A JPS5051474A JP S5051474 A JPS5051474 A JP S5051474A JP 10138673 A JP10138673 A JP 10138673A JP 10138673 A JP10138673 A JP 10138673A JP S5051474 A JPS5051474 A JP S5051474A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10138673A JPS5545633B2 (de) | 1973-09-08 | 1973-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10138673A JPS5545633B2 (de) | 1973-09-08 | 1973-09-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5051474A true JPS5051474A (de) | 1975-05-08 |
| JPS5545633B2 JPS5545633B2 (de) | 1980-11-19 |
Family
ID=14299310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10138673A Expired JPS5545633B2 (de) | 1973-09-08 | 1973-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5545633B2 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018529029A (ja) * | 2015-07-31 | 2018-10-04 | ヒルバーグ アンド パートナー ゲーエムベーハー | 誘導気化器、気化器システムおよび帯状の基板をコーティングするための気化方法 |
| KR20220166113A (ko) * | 2021-06-09 | 2022-12-16 | 선문대학교 산학협력단 | 열증착기용 히터 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0131539Y2 (de) * | 1980-12-12 | 1989-09-27 |
-
1973
- 1973-09-08 JP JP10138673A patent/JPS5545633B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018529029A (ja) * | 2015-07-31 | 2018-10-04 | ヒルバーグ アンド パートナー ゲーエムベーハー | 誘導気化器、気化器システムおよび帯状の基板をコーティングするための気化方法 |
| KR20220166113A (ko) * | 2021-06-09 | 2022-12-16 | 선문대학교 산학협력단 | 열증착기용 히터 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5545633B2 (de) | 1980-11-19 |