JPS5051265A - - Google Patents

Info

Publication number
JPS5051265A
JPS5051265A JP48100174A JP10017473A JPS5051265A JP S5051265 A JPS5051265 A JP S5051265A JP 48100174 A JP48100174 A JP 48100174A JP 10017473 A JP10017473 A JP 10017473A JP S5051265 A JPS5051265 A JP S5051265A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48100174A
Other versions
JPS5922373B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48100174A priority Critical patent/JPS5922373B2/ja
Publication of JPS5051265A publication Critical patent/JPS5051265A/ja
Publication of JPS5922373B2 publication Critical patent/JPS5922373B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP48100174A 1973-09-07 1973-09-07 半導体ウエハの処理法 Expired JPS5922373B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48100174A JPS5922373B2 (ja) 1973-09-07 1973-09-07 半導体ウエハの処理法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48100174A JPS5922373B2 (ja) 1973-09-07 1973-09-07 半導体ウエハの処理法

Publications (2)

Publication Number Publication Date
JPS5051265A true JPS5051265A (ja) 1975-05-08
JPS5922373B2 JPS5922373B2 (ja) 1984-05-26

Family

ID=14266942

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48100174A Expired JPS5922373B2 (ja) 1973-09-07 1973-09-07 半導体ウエハの処理法

Country Status (1)

Country Link
JP (1) JPS5922373B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53101977A (en) * 1977-02-17 1978-09-05 Matsushita Electronics Corp Diffusion method of inpurity to semiconductor substrate

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02126931U (ja) * 1989-03-29 1990-10-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53101977A (en) * 1977-02-17 1978-09-05 Matsushita Electronics Corp Diffusion method of inpurity to semiconductor substrate

Also Published As

Publication number Publication date
JPS5922373B2 (ja) 1984-05-26

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