JPS505105A - - Google Patents
Info
- Publication number
- JPS505105A JPS505105A JP5314173A JP5314173A JPS505105A JP S505105 A JPS505105 A JP S505105A JP 5314173 A JP5314173 A JP 5314173A JP 5314173 A JP5314173 A JP 5314173A JP S505105 A JPS505105 A JP S505105A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5314173A JPS505105A (cs) | 1973-05-15 | 1973-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5314173A JPS505105A (cs) | 1973-05-15 | 1973-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS505105A true JPS505105A (cs) | 1975-01-20 |
Family
ID=12934536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5314173A Pending JPS505105A (cs) | 1973-05-15 | 1973-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS505105A (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5679430A (en) * | 1979-12-03 | 1981-06-30 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Manufacture of semiconductor integrated circuit device |
| JPS6191948A (ja) * | 1984-10-12 | 1986-05-10 | Nec Corp | 半導体装置の製造方法 |
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1973
- 1973-05-15 JP JP5314173A patent/JPS505105A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5679430A (en) * | 1979-12-03 | 1981-06-30 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Manufacture of semiconductor integrated circuit device |
| JPS6191948A (ja) * | 1984-10-12 | 1986-05-10 | Nec Corp | 半導体装置の製造方法 |