JPS5050411A - - Google Patents

Info

Publication number
JPS5050411A
JPS5050411A JP48099217A JP9921773A JPS5050411A JP S5050411 A JPS5050411 A JP S5050411A JP 48099217 A JP48099217 A JP 48099217A JP 9921773 A JP9921773 A JP 9921773A JP S5050411 A JPS5050411 A JP S5050411A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48099217A
Other languages
Japanese (ja)
Other versions
JPS5710351B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9921773A priority Critical patent/JPS5710351B2/ja
Publication of JPS5050411A publication Critical patent/JPS5050411A/ja
Publication of JPS5710351B2 publication Critical patent/JPS5710351B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Ceramic Products (AREA)
JP9921773A 1973-09-05 1973-09-05 Expired JPS5710351B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9921773A JPS5710351B2 (enrdf_load_stackoverflow) 1973-09-05 1973-09-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9921773A JPS5710351B2 (enrdf_load_stackoverflow) 1973-09-05 1973-09-05

Publications (2)

Publication Number Publication Date
JPS5050411A true JPS5050411A (enrdf_load_stackoverflow) 1975-05-06
JPS5710351B2 JPS5710351B2 (enrdf_load_stackoverflow) 1982-02-25

Family

ID=14241479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9921773A Expired JPS5710351B2 (enrdf_load_stackoverflow) 1973-09-05 1973-09-05

Country Status (1)

Country Link
JP (1) JPS5710351B2 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5229656U (enrdf_load_stackoverflow) * 1975-07-31 1977-03-02
JPS5478670A (en) * 1977-12-05 1979-06-22 Nippon Telegr & Teleph Corp <Ntt> High-density packing integrated circuit substrate device
WO2023190524A1 (ja) * 2022-03-30 2023-10-05 京セラ株式会社 放熱板及びベイパーチャンバー
JP2024149708A (ja) * 2020-11-05 2024-10-18 東京エレクトロン株式会社 基板保持体、基板搬送装置及び基板保持体の製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5229656U (enrdf_load_stackoverflow) * 1975-07-31 1977-03-02
JPS5478670A (en) * 1977-12-05 1979-06-22 Nippon Telegr & Teleph Corp <Ntt> High-density packing integrated circuit substrate device
JP2024149708A (ja) * 2020-11-05 2024-10-18 東京エレクトロン株式会社 基板保持体、基板搬送装置及び基板保持体の製造方法
WO2023190524A1 (ja) * 2022-03-30 2023-10-05 京セラ株式会社 放熱板及びベイパーチャンバー

Also Published As

Publication number Publication date
JPS5710351B2 (enrdf_load_stackoverflow) 1982-02-25

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