JPS5050275A - - Google Patents

Info

Publication number
JPS5050275A
JPS5050275A JP8163374A JP8163374A JPS5050275A JP S5050275 A JPS5050275 A JP S5050275A JP 8163374 A JP8163374 A JP 8163374A JP 8163374 A JP8163374 A JP 8163374A JP S5050275 A JPS5050275 A JP S5050275A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8163374A
Other versions
JPS5325554B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5050275A publication Critical patent/JPS5050275A/ja
Publication of JPS5325554B2 publication Critical patent/JPS5325554B2/ja
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
JP8163374A 1973-08-08 1974-07-16 Expired JPS5325554B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US38648973A 1973-08-08 1973-08-08

Publications (2)

Publication Number Publication Date
JPS5050275A true JPS5050275A (ja) 1975-05-06
JPS5325554B2 JPS5325554B2 (ja) 1978-07-27

Family

ID=23525795

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8163374A Expired JPS5325554B2 (ja) 1973-08-08 1974-07-16

Country Status (5)

Country Link
JP (1) JPS5325554B2 (ja)
CA (1) CA1000803A (ja)
CH (1) CH583301A5 (ja)
FR (1) FR2240300B1 (ja)
GB (1) GB1432090A (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4420386A (en) * 1983-04-22 1983-12-13 White Engineering Corporation Method for pure ion plating using magnetic fields
US4891821A (en) * 1989-03-27 1990-01-02 Hanks Charles W Magnetic correcting fence for adjacent e-guns

Also Published As

Publication number Publication date
JPS5325554B2 (ja) 1978-07-27
CA1000803A (en) 1976-11-30
GB1432090A (en) 1976-04-14
CH583301A5 (ja) 1976-12-31
DE2429854B2 (de) 1976-10-14
DE2429854A1 (de) 1975-03-06
FR2240300A1 (ja) 1975-03-07
FR2240300B1 (ja) 1976-12-24

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