GB1432090A - Vapour source assembly - Google Patents

Vapour source assembly

Info

Publication number
GB1432090A
GB1432090A GB2534874A GB2534874A GB1432090A GB 1432090 A GB1432090 A GB 1432090A GB 2534874 A GB2534874 A GB 2534874A GB 2534874 A GB2534874 A GB 2534874A GB 1432090 A GB1432090 A GB 1432090A
Authority
GB
United Kingdom
Prior art keywords
crucible
electron beam
magnetic
source assembly
vapour source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2534874A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airco Inc
Original Assignee
Airco Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Airco Inc filed Critical Airco Inc
Publication of GB1432090A publication Critical patent/GB1432090A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1432090 Vapour source assembly AIRCO Inc 7 June 1974 [8 Aug 1973] 25348/74 Heading C7F A vapour source assembly comprises a crucible 12 for material 13 to be vapourized, an electron beam gun 14, deflecting means for producing at least one magnetic field having lines of force transverse to the electron beam to deflect it along an arcuate path from gun 14 to crucible 12, said deflecting means including a pair of magnetic pole members 16, 17, positioned on opposite sides of the crucible, and magnetic shield means positioned between said pole members and said crucible to shunt lines of magnetic force around said crucible. Said shield means may be a steel cylinder 19 around crucible 12 and need only extend over half the liquid depth. The crucible may be watercooled via inlet 33 and pipes 31, and the electron beam may be caused to sweep the crucible surface by varying the current in 3 coils in U-configuration, only one coil 103 of which is shown; the electron beam source may be a heated W filament 61 with accelerating anode 91 and the beam 15 passes as shown to the crucible; evaporation of Al is referred to. The magnetic shielding reduces undesirable disruption of the beam 15, leading to more regular evaporation.
GB2534874A 1973-08-08 1974-06-07 Vapour source assembly Expired GB1432090A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US38648973A 1973-08-08 1973-08-08

Publications (1)

Publication Number Publication Date
GB1432090A true GB1432090A (en) 1976-04-14

Family

ID=23525795

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2534874A Expired GB1432090A (en) 1973-08-08 1974-06-07 Vapour source assembly

Country Status (5)

Country Link
JP (1) JPS5325554B2 (en)
CA (1) CA1000803A (en)
CH (1) CH583301A5 (en)
FR (1) FR2240300B1 (en)
GB (1) GB1432090A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2138449A (en) * 1983-04-22 1984-10-24 White Eng Co Method for pure ion plating using magnetic fields

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4891821A (en) * 1989-03-27 1990-01-02 Hanks Charles W Magnetic correcting fence for adjacent e-guns

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2138449A (en) * 1983-04-22 1984-10-24 White Eng Co Method for pure ion plating using magnetic fields

Also Published As

Publication number Publication date
JPS5050275A (en) 1975-05-06
CH583301A5 (en) 1976-12-31
FR2240300A1 (en) 1975-03-07
DE2429854B2 (en) 1976-10-14
DE2429854A1 (en) 1975-03-06
FR2240300B1 (en) 1976-12-24
CA1000803A (en) 1976-11-30
JPS5325554B2 (en) 1978-07-27

Similar Documents

Publication Publication Date Title
US3420977A (en) Electron beam apparatus
EP0334204B1 (en) Process and apparatus for coating articles
DE69320151T2 (en) FLAT MAGNETIC SPRAYING SYSTEM
US3710072A (en) Vapor source assembly
DE4026367A1 (en) DEVICE FOR COATING SUBSTRATES
US3896258A (en) Electron beam gun system
US3235647A (en) Electron bombardment heating with adjustable impact pattern
US3068309A (en) Electron beam furnace with multiple field guidance of electrons
US3101515A (en) Electron beam furnace with magnetically guided axial and transverse beams
GB1014200A (en) Improvements in or relating to electron beam guns
GB982669A (en) Improvements in or relating to electron beam generators
DE4020158C2 (en) Device for coating substrates
US3268648A (en) Apparatus for vaporizing materials by an electron beam
GB1432090A (en) Vapour source assembly
JPH06228744A (en) Electron beam source assembly
GB1358411A (en) Sputtering
GB1564279A (en) Multiple electronbeam vapour source assembly
US3170019A (en) Electron beam furnace
US3883679A (en) Vapor source assembly
US3483417A (en) Electron beam deflecting means
JP2942301B2 (en) Fence device for electron gun magnetic field correction
EP0428682A4 (en) Magnetic structure for electron-beam heated evaporation source
GB1214949A (en) Apparatus for heating a target in an electron beam furnace
GB919298A (en) Improvements relating to electronic beam furnaces
US4038484A (en) Electron beam heating system

Legal Events

Date Code Title Description
PS Patent sealed
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PE20 Patent expired after termination of 20 years

Effective date: 19940606