JPS5046273A - - Google Patents
Info
- Publication number
- JPS5046273A JPS5046273A JP9668773A JP9668773A JPS5046273A JP S5046273 A JPS5046273 A JP S5046273A JP 9668773 A JP9668773 A JP 9668773A JP 9668773 A JP9668773 A JP 9668773A JP S5046273 A JPS5046273 A JP S5046273A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9668773A JPS5046273A (ko) | 1973-08-30 | 1973-08-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9668773A JPS5046273A (ko) | 1973-08-30 | 1973-08-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5046273A true JPS5046273A (ko) | 1975-04-24 |
Family
ID=14171690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9668773A Pending JPS5046273A (ko) | 1973-08-30 | 1973-08-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5046273A (ko) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51140473A (en) * | 1975-05-30 | 1976-12-03 | Hitachi Ltd | Device for forming film |
| JPS51140889A (en) * | 1975-05-30 | 1976-12-04 | Hitachi Ltd | A vapor phase growth apparatus |
| JPS59200424A (ja) * | 1983-04-28 | 1984-11-13 | Hitachi Electronics Eng Co Ltd | Ｃｖｄ装置 |
| JP2009517541A (ja) * | 2005-11-25 | 2009-04-30 | アイクストロン、アーゲー | ガス入口部品を有するｃｖｄ反応装置 |
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1973
- 1973-08-30 JP JP9668773A patent/JPS5046273A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51140473A (en) * | 1975-05-30 | 1976-12-03 | Hitachi Ltd | Device for forming film |
| JPS51140889A (en) * | 1975-05-30 | 1976-12-04 | Hitachi Ltd | A vapor phase growth apparatus |
| JPS557689B2 (ko) * | 1975-05-30 | 1980-02-27 | ||
| JPS59200424A (ja) * | 1983-04-28 | 1984-11-13 | Hitachi Electronics Eng Co Ltd | Ｃｖｄ装置 |
| JP2009517541A (ja) * | 2005-11-25 | 2009-04-30 | アイクストロン、アーゲー | ガス入口部品を有するｃｖｄ反応装置 |