JPS5046080A - - Google Patents
Info
- Publication number
- JPS5046080A JPS5046080A JP48096814A JP9681473A JPS5046080A JP S5046080 A JPS5046080 A JP S5046080A JP 48096814 A JP48096814 A JP 48096814A JP 9681473 A JP9681473 A JP 9681473A JP S5046080 A JPS5046080 A JP S5046080A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Projection-Type Copiers In General (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48096814A JPS5046080A (enExample) | 1973-08-28 | 1973-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48096814A JPS5046080A (enExample) | 1973-08-28 | 1973-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5046080A true JPS5046080A (enExample) | 1975-04-24 |
Family
ID=14175044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48096814A Pending JPS5046080A (enExample) | 1973-08-28 | 1973-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5046080A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59155843A (ja) * | 1984-01-27 | 1984-09-05 | Hitachi Ltd | 露光装置 |
| JPS60162218A (ja) * | 1984-02-02 | 1985-08-24 | Canon Inc | 露光装置 |
| JPS63288014A (ja) * | 1988-04-22 | 1988-11-25 | Canon Inc | 焼付け装置 |
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1973
- 1973-08-28 JP JP48096814A patent/JPS5046080A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59155843A (ja) * | 1984-01-27 | 1984-09-05 | Hitachi Ltd | 露光装置 |
| JPS60162218A (ja) * | 1984-02-02 | 1985-08-24 | Canon Inc | 露光装置 |
| JPS63288014A (ja) * | 1988-04-22 | 1988-11-25 | Canon Inc | 焼付け装置 |