JPS5043564U - - Google Patents
Info
- Publication number
- JPS5043564U JPS5043564U JP9622973U JP9622973U JPS5043564U JP S5043564 U JPS5043564 U JP S5043564U JP 9622973 U JP9622973 U JP 9622973U JP 9622973 U JP9622973 U JP 9622973U JP S5043564 U JPS5043564 U JP S5043564U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9622973U JPS5313244Y2 (enExample) | 1973-08-16 | 1973-08-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9622973U JPS5313244Y2 (enExample) | 1973-08-16 | 1973-08-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5043564U true JPS5043564U (enExample) | 1975-05-01 |
| JPS5313244Y2 JPS5313244Y2 (enExample) | 1978-04-10 |
Family
ID=28293697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9622973U Expired JPS5313244Y2 (enExample) | 1973-08-16 | 1973-08-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5313244Y2 (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56118347A (en) * | 1980-02-22 | 1981-09-17 | Hitachi Ltd | Drying device |
| JPS58111320A (ja) * | 1981-12-25 | 1983-07-02 | Hitachi Ltd | スピンナ |
| JPS614772U (ja) * | 1984-06-12 | 1986-01-13 | ホ−ヤ株式会社 | スプレ−装置 |
| JPH0286144A (ja) * | 1988-09-22 | 1990-03-27 | Dainippon Screen Mfg Co Ltd | 基板処理装置における基板装着姿勢検出装置 |
-
1973
- 1973-08-16 JP JP9622973U patent/JPS5313244Y2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56118347A (en) * | 1980-02-22 | 1981-09-17 | Hitachi Ltd | Drying device |
| JPS58111320A (ja) * | 1981-12-25 | 1983-07-02 | Hitachi Ltd | スピンナ |
| JPS614772U (ja) * | 1984-06-12 | 1986-01-13 | ホ−ヤ株式会社 | スプレ−装置 |
| JPH0286144A (ja) * | 1988-09-22 | 1990-03-27 | Dainippon Screen Mfg Co Ltd | 基板処理装置における基板装着姿勢検出装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5313244Y2 (enExample) | 1978-04-10 |