JPS5043564U - - Google Patents

Info

Publication number
JPS5043564U
JPS5043564U JP9622973U JP9622973U JPS5043564U JP S5043564 U JPS5043564 U JP S5043564U JP 9622973 U JP9622973 U JP 9622973U JP 9622973 U JP9622973 U JP 9622973U JP S5043564 U JPS5043564 U JP S5043564U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9622973U
Other languages
Japanese (ja)
Other versions
JPS5313244Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9622973U priority Critical patent/JPS5313244Y2/ja
Publication of JPS5043564U publication Critical patent/JPS5043564U/ja
Application granted granted Critical
Publication of JPS5313244Y2 publication Critical patent/JPS5313244Y2/ja
Expired legal-status Critical Current

Links

JP9622973U 1973-08-16 1973-08-16 Expired JPS5313244Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9622973U JPS5313244Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-08-16 1973-08-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9622973U JPS5313244Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-08-16 1973-08-16

Publications (2)

Publication Number Publication Date
JPS5043564U true JPS5043564U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-05-01
JPS5313244Y2 JPS5313244Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-04-10

Family

ID=28293697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9622973U Expired JPS5313244Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-08-16 1973-08-16

Country Status (1)

Country Link
JP (1) JPS5313244Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56118347A (en) * 1980-02-22 1981-09-17 Hitachi Ltd Drying device
JPS58111320A (ja) * 1981-12-25 1983-07-02 Hitachi Ltd スピンナ
JPS614772U (ja) * 1984-06-12 1986-01-13 ホ−ヤ株式会社 スプレ−装置
JPH0286144A (ja) * 1988-09-22 1990-03-27 Dainippon Screen Mfg Co Ltd 基板処理装置における基板装着姿勢検出装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56118347A (en) * 1980-02-22 1981-09-17 Hitachi Ltd Drying device
JPS58111320A (ja) * 1981-12-25 1983-07-02 Hitachi Ltd スピンナ
JPS614772U (ja) * 1984-06-12 1986-01-13 ホ−ヤ株式会社 スプレ−装置
JPH0286144A (ja) * 1988-09-22 1990-03-27 Dainippon Screen Mfg Co Ltd 基板処理装置における基板装着姿勢検出装置

Also Published As

Publication number Publication date
JPS5313244Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-04-10

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