JPS50427A - - Google Patents
Info
- Publication number
- JPS50427A JPS50427A JP5093573A JP5093573A JPS50427A JP S50427 A JPS50427 A JP S50427A JP 5093573 A JP5093573 A JP 5093573A JP 5093573 A JP5093573 A JP 5093573A JP S50427 A JPS50427 A JP S50427A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5093573A JPS50427A (en) | 1973-05-07 | 1973-05-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5093573A JPS50427A (en) | 1973-05-07 | 1973-05-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50427A true JPS50427A (en) | 1975-01-07 |
Family
ID=12872663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5093573A Pending JPS50427A (en) | 1973-05-07 | 1973-05-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50427A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4468259A (en) * | 1981-12-04 | 1984-08-28 | Ushio Denki Kabushiki Kaisha | Uniform wafer heating by controlling light source and circumferential heating of wafer |
-
1973
- 1973-05-07 JP JP5093573A patent/JPS50427A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4468259A (en) * | 1981-12-04 | 1984-08-28 | Ushio Denki Kabushiki Kaisha | Uniform wafer heating by controlling light source and circumferential heating of wafer |