JPS5039164A - - Google Patents

Info

Publication number
JPS5039164A
JPS5039164A JP8922873A JP8922873A JPS5039164A JP S5039164 A JPS5039164 A JP S5039164A JP 8922873 A JP8922873 A JP 8922873A JP 8922873 A JP8922873 A JP 8922873A JP S5039164 A JPS5039164 A JP S5039164A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8922873A
Other languages
Japanese (ja)
Other versions
JPS5336789B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8922873A priority Critical patent/JPS5336789B2/ja
Publication of JPS5039164A publication Critical patent/JPS5039164A/ja
Publication of JPS5336789B2 publication Critical patent/JPS5336789B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP8922873A 1973-08-10 1973-08-10 Expired JPS5336789B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8922873A JPS5336789B2 (en) 1973-08-10 1973-08-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8922873A JPS5336789B2 (en) 1973-08-10 1973-08-10

Publications (2)

Publication Number Publication Date
JPS5039164A true JPS5039164A (en) 1975-04-11
JPS5336789B2 JPS5336789B2 (en) 1978-10-04

Family

ID=13964872

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8922873A Expired JPS5336789B2 (en) 1973-08-10 1973-08-10

Country Status (1)

Country Link
JP (1) JPS5336789B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417764A (en) * 1977-07-08 1979-02-09 Nippon Telegr & Teleph Corp <Ntt> Plane shape measuring system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3535024A (en) * 1968-04-04 1970-10-20 Webb James E Interferometer servo system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3535024A (en) * 1968-04-04 1970-10-20 Webb James E Interferometer servo system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417764A (en) * 1977-07-08 1979-02-09 Nippon Telegr & Teleph Corp <Ntt> Plane shape measuring system
JPS5823565B2 (en) * 1977-07-08 1983-05-16 日本電信電話株式会社 Planar shape measurement method

Also Published As

Publication number Publication date
JPS5336789B2 (en) 1978-10-04

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