JPS5039164A - - Google Patents
Info
- Publication number
- JPS5039164A JPS5039164A JP8922873A JP8922873A JPS5039164A JP S5039164 A JPS5039164 A JP S5039164A JP 8922873 A JP8922873 A JP 8922873A JP 8922873 A JP8922873 A JP 8922873A JP S5039164 A JPS5039164 A JP S5039164A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8922873A JPS5336789B2 (en) | 1973-08-10 | 1973-08-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8922873A JPS5336789B2 (en) | 1973-08-10 | 1973-08-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5039164A true JPS5039164A (en) | 1975-04-11 |
JPS5336789B2 JPS5336789B2 (en) | 1978-10-04 |
Family
ID=13964872
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8922873A Expired JPS5336789B2 (en) | 1973-08-10 | 1973-08-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5336789B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5417764A (en) * | 1977-07-08 | 1979-02-09 | Nippon Telegr & Teleph Corp <Ntt> | Plane shape measuring system |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3535024A (en) * | 1968-04-04 | 1970-10-20 | Webb James E | Interferometer servo system |
-
1973
- 1973-08-10 JP JP8922873A patent/JPS5336789B2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3535024A (en) * | 1968-04-04 | 1970-10-20 | Webb James E | Interferometer servo system |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5417764A (en) * | 1977-07-08 | 1979-02-09 | Nippon Telegr & Teleph Corp <Ntt> | Plane shape measuring system |
JPS5823565B2 (en) * | 1977-07-08 | 1983-05-16 | 日本電信電話株式会社 | Planar shape measurement method |
Also Published As
Publication number | Publication date |
---|---|
JPS5336789B2 (en) | 1978-10-04 |