JPS5037503B2 - - Google Patents
Info
- Publication number
- JPS5037503B2 JPS5037503B2 JP7172271A JP7172271A JPS5037503B2 JP S5037503 B2 JPS5037503 B2 JP S5037503B2 JP 7172271 A JP7172271 A JP 7172271A JP 7172271 A JP7172271 A JP 7172271A JP S5037503 B2 JPS5037503 B2 JP S5037503B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Element Separation (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7172271A JPS5037503B2 (ja) | 1971-09-17 | 1971-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7172271A JPS5037503B2 (ja) | 1971-09-17 | 1971-09-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4838689A JPS4838689A (ja) | 1973-06-07 |
| JPS5037503B2 true JPS5037503B2 (ja) | 1975-12-03 |
Family
ID=13468684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7172271A Expired JPS5037503B2 (ja) | 1971-09-17 | 1971-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5037503B2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5230171A (en) * | 1975-09-03 | 1977-03-07 | Hitachi Ltd | Method for fabrication of semiconductor device |
-
1971
- 1971-09-17 JP JP7172271A patent/JPS5037503B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4838689A (ja) | 1973-06-07 |