JPS5037060U - - Google Patents
Info
- Publication number
- JPS5037060U JPS5037060U JP9023873U JP9023873U JPS5037060U JP S5037060 U JPS5037060 U JP S5037060U JP 9023873 U JP9023873 U JP 9023873U JP 9023873 U JP9023873 U JP 9023873U JP S5037060 U JPS5037060 U JP S5037060U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Switches Operated By Changes In Physical Conditions (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9023873U JPS5037060U (en) | 1973-07-30 | 1973-07-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9023873U JPS5037060U (en) | 1973-07-30 | 1973-07-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5037060U true JPS5037060U (en) | 1975-04-18 |
Family
ID=28277398
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9023873U Pending JPS5037060U (en) | 1973-07-30 | 1973-07-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5037060U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4889439U (en) * | 1972-01-31 | 1973-10-27 | ||
JP5319856B1 (en) * | 2012-06-13 | 2013-10-16 | 株式会社シンクロン | Film thickness measuring apparatus and film forming apparatus |
-
1973
- 1973-07-30 JP JP9023873U patent/JPS5037060U/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4889439U (en) * | 1972-01-31 | 1973-10-27 | ||
JP5319856B1 (en) * | 2012-06-13 | 2013-10-16 | 株式会社シンクロン | Film thickness measuring apparatus and film forming apparatus |
WO2013186879A1 (en) * | 2012-06-13 | 2013-12-19 | 株式会社シンクロン | Device for measuring film thickness and device for forming film |