JPS5036536A - - Google Patents
Info
- Publication number
- JPS5036536A JPS5036536A JP48087549A JP8754973A JPS5036536A JP S5036536 A JPS5036536 A JP S5036536A JP 48087549 A JP48087549 A JP 48087549A JP 8754973 A JP8754973 A JP 8754973A JP S5036536 A JPS5036536 A JP S5036536A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8754973A JPS567744B2 (ja) | 1973-08-06 | 1973-08-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8754973A JPS567744B2 (ja) | 1973-08-06 | 1973-08-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5036536A true JPS5036536A (ja) | 1975-04-05 |
| JPS567744B2 JPS567744B2 (ja) | 1981-02-19 |
Family
ID=13918055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8754973A Expired JPS567744B2 (ja) | 1973-08-06 | 1973-08-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS567744B2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6120331A (ja) * | 1984-07-09 | 1986-01-29 | Nec Corp | レジストベ−ク装置 |
| JPS6146028A (ja) * | 1984-08-10 | 1986-03-06 | Fujitsu Ltd | レジスト塗布装置 |
-
1973
- 1973-08-06 JP JP8754973A patent/JPS567744B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6120331A (ja) * | 1984-07-09 | 1986-01-29 | Nec Corp | レジストベ−ク装置 |
| JPS6146028A (ja) * | 1984-08-10 | 1986-03-06 | Fujitsu Ltd | レジスト塗布装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS567744B2 (ja) | 1981-02-19 |