JPS5036536A - - Google Patents

Info

Publication number
JPS5036536A
JPS5036536A JP48087549A JP8754973A JPS5036536A JP S5036536 A JPS5036536 A JP S5036536A JP 48087549 A JP48087549 A JP 48087549A JP 8754973 A JP8754973 A JP 8754973A JP S5036536 A JPS5036536 A JP S5036536A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48087549A
Other versions
JPS567744B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8754973A priority Critical patent/JPS567744B2/ja
Publication of JPS5036536A publication Critical patent/JPS5036536A/ja
Publication of JPS567744B2 publication Critical patent/JPS567744B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP8754973A 1973-08-06 1973-08-06 Expired JPS567744B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8754973A JPS567744B2 (ja) 1973-08-06 1973-08-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8754973A JPS567744B2 (ja) 1973-08-06 1973-08-06

Publications (2)

Publication Number Publication Date
JPS5036536A true JPS5036536A (ja) 1975-04-05
JPS567744B2 JPS567744B2 (ja) 1981-02-19

Family

ID=13918055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8754973A Expired JPS567744B2 (ja) 1973-08-06 1973-08-06

Country Status (1)

Country Link
JP (1) JPS567744B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6120331A (ja) * 1984-07-09 1986-01-29 Nec Corp レジストベ−ク装置
JPS6146028A (ja) * 1984-08-10 1986-03-06 Fujitsu Ltd レジスト塗布装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6120331A (ja) * 1984-07-09 1986-01-29 Nec Corp レジストベ−ク装置
JPS6146028A (ja) * 1984-08-10 1986-03-06 Fujitsu Ltd レジスト塗布装置

Also Published As

Publication number Publication date
JPS567744B2 (ja) 1981-02-19

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