JPS5036535A - - Google Patents

Info

Publication number
JPS5036535A
JPS5036535A JP8754873A JP8754873A JPS5036535A JP S5036535 A JPS5036535 A JP S5036535A JP 8754873 A JP8754873 A JP 8754873A JP 8754873 A JP8754873 A JP 8754873A JP S5036535 A JPS5036535 A JP S5036535A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8754873A
Other languages
Japanese (ja)
Other versions
JPS567743B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8754873A priority Critical patent/JPS567743B2/ja
Publication of JPS5036535A publication Critical patent/JPS5036535A/ja
Publication of JPS567743B2 publication Critical patent/JPS567743B2/ja
Expired legal-status Critical Current

Links

JP8754873A 1973-08-06 1973-08-06 Expired JPS567743B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8754873A JPS567743B2 (en) 1973-08-06 1973-08-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8754873A JPS567743B2 (en) 1973-08-06 1973-08-06

Publications (2)

Publication Number Publication Date
JPS5036535A true JPS5036535A (en) 1975-04-05
JPS567743B2 JPS567743B2 (en) 1981-02-19

Family

ID=13918027

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8754873A Expired JPS567743B2 (en) 1973-08-06 1973-08-06

Country Status (1)

Country Link
JP (1) JPS567743B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5778636A (en) * 1980-10-31 1982-05-17 Fujitsu Ltd Spin coater

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5778636A (en) * 1980-10-31 1982-05-17 Fujitsu Ltd Spin coater

Also Published As

Publication number Publication date
JPS567743B2 (en) 1981-02-19

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