JPS5036397B1 - - Google Patents
Info
- Publication number
- JPS5036397B1 JPS5036397B1 JP44054506A JP5450669A JPS5036397B1 JP S5036397 B1 JPS5036397 B1 JP S5036397B1 JP 44054506 A JP44054506 A JP 44054506A JP 5450669 A JP5450669 A JP 5450669A JP S5036397 B1 JPS5036397 B1 JP S5036397B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP44054506A JPS5036397B1 (ja) | 1969-07-11 | 1969-07-11 | |
| US53481A US3628009A (en) | 1969-07-11 | 1970-07-09 | Scanning-type sputtering mass spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP44054506A JPS5036397B1 (ja) | 1969-07-11 | 1969-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5036397B1 true JPS5036397B1 (ja) | 1975-11-25 |
Family
ID=12972506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP44054506A Pending JPS5036397B1 (ja) | 1969-07-11 | 1969-07-11 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3628009A (ja) |
| JP (1) | JPS5036397B1 (ja) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5243058B2 (ja) * | 1974-04-22 | 1977-10-28 | ||
| JPS6197557A (ja) * | 1984-10-19 | 1986-05-16 | Kawasaki Steel Corp | 二次イオン質量分析装置 |
| FR2624610B1 (fr) * | 1987-12-11 | 1990-03-30 | Cameca | Procede d'analyse en temps de vol, a balayage continu, et dispositif d'analyse pour la mise en oeuvre de ce procede |
| US4968888A (en) * | 1989-07-05 | 1990-11-06 | The United States Of America As Represented By The United States Department Of Energy | Pulsed field sample neutralization |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3445650A (en) * | 1965-10-11 | 1969-05-20 | Applied Res Lab | Double focussing mass spectrometer including a wedge-shaped magnetic sector field |
-
1969
- 1969-07-11 JP JP44054506A patent/JPS5036397B1/ja active Pending
-
1970
- 1970-07-09 US US53481A patent/US3628009A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US3628009A (en) | 1971-12-14 |