JPS5036127B1 - - Google Patents

Info

Publication number
JPS5036127B1
JPS5036127B1 JP46036498A JP3649871A JPS5036127B1 JP S5036127 B1 JPS5036127 B1 JP S5036127B1 JP 46036498 A JP46036498 A JP 46036498A JP 3649871 A JP3649871 A JP 3649871A JP S5036127 B1 JPS5036127 B1 JP S5036127B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP46036498A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP46036498A priority Critical patent/JPS5036127B1/ja
Priority to US00238513A priority patent/US3819408A/en
Priority to GB1499272A priority patent/GB1378678A/en
Publication of JPS5036127B1 publication Critical patent/JPS5036127B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
    • H01J9/125—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes of secondary emission electrodes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/32—Secondary emission electrodes
JP46036498A 1971-05-27 1971-05-27 Pending JPS5036127B1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP46036498A JPS5036127B1 (de) 1971-05-27 1971-05-27
US00238513A US3819408A (en) 1971-05-27 1972-03-27 Method for manufacturing vapor deposited electrode
GB1499272A GB1378678A (en) 1971-05-27 1972-03-30 Method for manufacturing a vapour despostied electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46036498A JPS5036127B1 (de) 1971-05-27 1971-05-27

Publications (1)

Publication Number Publication Date
JPS5036127B1 true JPS5036127B1 (de) 1975-11-21

Family

ID=12471473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46036498A Pending JPS5036127B1 (de) 1971-05-27 1971-05-27

Country Status (3)

Country Link
US (1) US3819408A (de)
JP (1) JPS5036127B1 (de)
GB (1) GB1378678A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4510989A (en) * 1981-03-23 1985-04-16 Mayer Frederic C Production of metal rods
CN107988576A (zh) * 2017-11-30 2018-05-04 西安交通大学 一种氧化镁金属陶瓷二次电子发射薄膜及其制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3636919A (en) * 1969-12-02 1972-01-25 Univ Ohio State Apparatus for growing films
US2527747A (en) * 1946-01-03 1950-10-31 Margaret N Lewis Apparatus for coating articles by thermal evaporation
NL268538A (de) * 1960-08-29
US3326717A (en) * 1962-12-10 1967-06-20 Ibm Circuit fabrication

Also Published As

Publication number Publication date
US3819408A (en) 1974-06-25
GB1378678A (en) 1974-12-27

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