JPS5035518Y2 - - Google Patents
Info
- Publication number
- JPS5035518Y2 JPS5035518Y2 JP6184771U JP6184771U JPS5035518Y2 JP S5035518 Y2 JPS5035518 Y2 JP S5035518Y2 JP 6184771 U JP6184771 U JP 6184771U JP 6184771 U JP6184771 U JP 6184771U JP S5035518 Y2 JPS5035518 Y2 JP S5035518Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Screw Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6184771U JPS5035518Y2 (https=) | 1971-07-13 | 1971-07-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6184771U JPS5035518Y2 (https=) | 1971-07-13 | 1971-07-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4817890U JPS4817890U (https=) | 1973-02-28 |
| JPS5035518Y2 true JPS5035518Y2 (https=) | 1975-10-16 |
Family
ID=27951612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6184771U Expired JPS5035518Y2 (https=) | 1971-07-13 | 1971-07-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5035518Y2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4968356U (https=) * | 1972-09-30 | 1974-06-14 | ||
| JPS5331726Y2 (https=) * | 1974-02-19 | 1978-08-07 | ||
| JPS5281045U (https=) * | 1975-12-13 | 1977-06-16 | ||
| EP3610493A4 (en) | 2017-04-11 | 2021-07-07 | ASML Netherlands B.V. | CHARGE PARTICLE SOURCE MODULE |
-
1971
- 1971-07-13 JP JP6184771U patent/JPS5035518Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4817890U (https=) | 1973-02-28 |